1. Special issue of the high-aspect-ratio micro-structure technology workshop, HARMST’07, Besançon, France, 7–9 June 2007

   • Chantal Khan Malek
   • Volker Saile
   • Bernd Michel

   Editorial 22 February 2008 Pages: 1215 - 1216

   

2. Application of inclined-exposure and thick film process for high aspect-ratio micro-structures on polymer optic devices

   • Kuo-Yung Hung
   • Te-Hsien Liang

   Technical Paper 22 January 2008 Pages: 1217 - 1222

   

3. Fabricating HARMS by using megasonic assisted electroforming

   • Gang Liu
   • Xinlong Huang
   • Yangchao Tian

   Technical Paper 25 January 2008 Pages: 1223 - 1226

   

4. Statistical process and measurement control for micro production

   • G. Lanza
   • J. Fleischer
   • M. Schlipf

   Technical Paper 08 January 2008 Pages: 1227 - 1232

   

5. High throughput projection UV lithography of high-aspect-ratio thick SU-8 microstructures

   • Ren Yang
   • Chuck Mullen
   • Ron Sheets

   Technical Paper 08 January 2008 Pages: 1233 - 1243

   

6. Fabrication of ceramic microcomponents and microreactor for the steam reforming of ethanol

   • Jun Wang
   • Gang Liu
   • Yangchao Tian

   Technical Paper 22 January 2008 Pages: 1245 - 1249

   

7. Fabrication of Fresnel zone plates with high aspect ratio by soft X-ray lithography

   • Longhua Liu
   • Gang Liu
   • Yangchao Tian

   Technical Paper 23 January 2008 Pages: 1251 - 1255

   

8. Applications of thick Sacrificial-Layer of zinc in LIGA process

   • XinLong Huang
   • Gang Liu
   • Yangchao Tian

   Technical Paper 31 January 2008 Pages: 1257 - 1261

   

9. Fast patterning microstructures using inkjet printing conformal masks

   • C.-H. Lin
   • H. Yang
   • M.-T. Yen

   Technical Paper 05 February 2008 Pages: 1263 - 1267

   

10. On the simulation of molded micro components and systems

    • Albert Albers
    • Hans-Georg Enkler
    • Pablo Leslabay

    Technical Paper 05 March 2008 Pages: 1269 - 1277

    

11. The anomalous behavior and properties of Ni–Co films codeposited in the sulfamate-chloride electrolyte

    • C. K. Chung
    • R. X. Zhou
    • W. T. Chang

    Technical Paper 09 January 2008 Pages: 1279 - 1284

    

12. Microlens array fabrication by backside exposure using Fraunhofer diffraction

    • In-Hyouk Song
    • Kyung-Nam Kang
    • Pratul K. Ajmera

    Technical Paper 08 January 2008 Pages: 1285 - 1290

    

13. Lithography with UV-LED array for curved surface structure

    • S. Suzuki
    • Y. Matsumoto

    Technical Paper 23 January 2008 Pages: 1291 - 1297

    

14. Reflectivity test of X-ray mirrors for deep X-ray lithography

    • V. Nazmov
    • E. Reznikova
    • J. Mohr

    Technical Paper 22 February 2008 Pages: 1299 - 1303

    

15. Fabrication of micro sloping structures of SU-8 by substrate penetration lithography

    • J. Onishi
    • K. Makabe
    • Y. Matsumoto

    Technical Paper 14 May 2008 Pages: 1305 - 1310

    

16. Fabrication of large area diffraction grating using LIGA process

    • Daiji Noda
    • Makoto Tanaka
    • Tadashi Hattori

    Technical Paper 28 February 2008 Pages: 1311 - 1315

    

17. Effect of baffle height and Reynolds number on fluid mixing

    • C. K. Chung
    • C.-Y. Wu
    • T. R. Shih

    Technical Paper 09 January 2008 Pages: 1317 - 1323

    

18. Effect of applying ultrasonic vibration in thermal nanoimprint lithography

    • Harutaka Mekaru
    • Toshihiko Noguchi
    • Masaharu Takahashi

    Technical Paper 09 January 2008 Pages: 1325 - 1333

    

19. A Si stencil mask for deep X-ray lithography fabricated by MEMS technology

    • Harutaka Mekaru
    • Takayuki Takano
    • Masaharu Takahashi

    Technical Paper 09 January 2008 Pages: 1335 - 1342

    

20. Proton beam writing: a platform technology for nanowire production

    • J. A. van Kan
    • F. Zhang
    • F. Watt

    Technical Paper 08 January 2008 Pages: 1343 - 1348

    

21. High-aspect-ratio through-hole array microfabricated in a PMMA plate for monodisperse emulsion production

    • Isao Kobayashi
    • Sayumi Hirose
    • Mitsutoshi Nakajima

    Technical Paper 10 January 2008 Pages: 1349 - 1357

    

22. Micromachining of electroformed nickel mold using thick photoresist microstructure for imprint technology

    • Takayuki Shibata
    • Yoichi Takahashi
    • Eiji Makino

    Technical Paper 09 January 2008 Pages: 1359 - 1365

    

23. Process parameter analysis in ablating micro-mold manufacturing

    • J. Fleischer
    • G. Halvadjiysky
    • S. Haupt

    Technical Paper 09 January 2008 Pages: 1367 - 1372

    

24. Cylindrical coils created with 3D X-ray lithography and metallization

    • Yoshifumi Matsumoto
    • Masaru Setomoto
    • Tadashi Hattori

    Technical Paper 22 January 2008 Pages: 1373 - 1379

    

25. Resin micromachining by roller hot embossing

    • Naoya Ishizawa
    • Kazuyoshi Idei
    • Tadashi Hattori

    Technical Paper 22 January 2008 Pages: 1381 - 1388

    

26. Effect of cobalt content on the work function of the electrodeposited nickel–cobalt films

    • C. K. Chung
    • W. T. Chang
    • R. X. Zhou

    Technical Paper 08 January 2008 Pages: 1389 - 1394

    

27. Fabrication of the cyclical fluid channel using the surface acoustic wave actuator and continuous fluid pumping in the cyclical fluid channel

    • Daisuke Fukuoka
    • Y. Utsumi

    Technical Paper 18 March 2008 Pages: 1395 - 1398

    

28. High sensitive immunoassay for endocrine disrupting chemicals using antibody immobilized microcapillary bundle structure

    • Yuichi Utsumi
    • Toshifumi Asano
    • Seiji Negoro

    Technical Paper 19 February 2008 Pages: 1399 - 1403

    

29. Microstructure formation on low temperature co-fired ceramic green substrates using micro embossing

    • Xuechuan Shan
    • H. P. Maw
    • R. Jachowicz

    Technical Paper 23 January 2008 Pages: 1405 - 1409

    

30. High efficiency mixing by the use of cross-linked micro capillary fluid filter

    • K. Fujiwara
    • Y. Ukita
    • Y. Utsumi

    Technical Paper 28 February 2008 Pages: 1411 - 1416

    

31. Fabrication of a PTFE-filled waveguide for millimeter-wave components using SR direct etching

    • Mitsuyoshi Kishihara
    • Yoshiaki Ukita
    • Isao Ohta

    Technical Paper 12 February 2008 Pages: 1417 - 1422

    

32. Aqueous base developable: easy stripping, high aspect ratio negative photoresist for optical and proton beam lithography

    • M. Chatzichristidi
    • I. Rajta
    • I. Raptis

    Technical Paper 06 February 2008 Pages: 1423 - 1428

    

33. Chip-level integration of RF MEMS on-chip inductors using UV-LIGA technique

    • Daniel Sang-Won Park
    • Youngkyun Jeong
    • Sungyong Jung

    Technical Paper 08 January 2008 Pages: 1429 - 1438

    

34. Femtosecond pulse laser interactions with thin silicon films and crater formation considering optical phonons and wave interference

    • Hyung Sub Sim
    • Seong Hyuk Lee
    • Kwan Gu Kang

    Technical Paper 25 January 2008 Pages: 1439 - 1446

    

35. A new UV sensitive positive resist for X-ray masks manufacture

    • Anja Voigt
    • Marina Heinrich
    • I. Rudolph

    Technical Paper 01 February 2008 Pages: 1447 - 1450

    

36. High functionality of a polymer nanocomposite material for MEMS applications

    • Fareed Dawan
    • Yoonyoung Jin
    • Samuel Ibekwe

    Technical Paper 12 February 2008 Pages: 1451 - 1459

    

37. Integrated structure of PMMA microchannels for DNA separation by microchip capillary electrophoresis

    • Yuichi Utsumi
    • Tomohiro Ikeda
    • Kazuo Suwa

    Technical Paper 15 March 2008 Pages: 1461 - 1466

    

38. Enhancement of the adhesive force of metal films on PTFE surface achieved by fast-atom-beam surface modification

    • Yuichi Utsumi
    • Takefumi Kishimoto

    Technical Paper 19 February 2008 Pages: 1467 - 1473

    

39. Investigations of development process of high hollow beveled microneedles using a combination of ICP RIE and dicing saw

    • N. Baron
    • J. Passave
    • G. Cabodevila

    Technical Paper 04 March 2008 Pages: 1475 - 1480

    

40. Validation of micromechanical systems

    • Albert Albers
    • Norbert Burkardt
    • Stefan Hauser

    Technical Paper 04 March 2008 Pages: 1481 - 1485

    

41. Commercialising HARMST-LIGA technologies

    • David Tolfree

    Technical Paper 24 April 2008 Pages: 1487 - 1489

    

42. Why you will use the deep X-ray LIG(A) technology to produce MEMS?

    • Pascal Meyer
    • Joachim Schulz
    • Volker Saile

    Technical Paper 09 January 2008 Pages: 1491 - 1497

    

43. Using bulk micromachined structures to enhance pool boiling heat transfer

    • Min Zhang
    • Kun Lian

    Technical Paper 08 January 2008 Pages: 1499 - 1505

    

44. Micro injection molding for mass production using LIGA mold inserts

    • Takanori Katoh
    • Ryuichi Tokuno
    • Masaharu Akamatsu

    Technical Paper 08 January 2008 Pages: 1507 - 1514

    

45. Stress engineering and mechanical properties of SU-8-layers for mechanical applications

    • J. Hammacher
    • A. Fuelle
    • J. Grimm

    Technical Paper 08 January 2008 Pages: 1515 - 1523

    

46. Manufacturing of microstructures with high aspect ratio by micromachining

    • T. Gietzelt
    • L. Eichhorn
    • K. Schubert

    Technical Paper 17 January 2008 Pages: 1525 - 1529

    

47. Thermal stability of electrodeposited LIGA Ni–W alloys for high temperature MEMS applications

    • M. Haj-Taieb
    • A. S. M. A. Haseeb
    • K. J. Hemker

    Technical Paper 28 May 2008 Pages: 1531 - 1536

    

48. Ni electroplating on a resist micro-machined by proton beam writing

    • Naoyuki Uchiya
    • Yusuke Furuta
    • Tomihiro Kamiya

    Technical Paper 29 January 2008 Pages: 1537 - 1540

    

49. High aspect ratio glass structures produced by means of the drawing technology

    • A. Hesse
    • S. Mrotzek
    • E. Rädlein

    Technical Paper 23 January 2008 Pages: 1541 - 1544

    

50. Modelling of the filling of micro-cavities of finite geometry by amorphous polymers using hot-embossing

    • M. Sahli
    • C. Roques-Carmes
    • J. C. Gelin

    Technical Paper 29 January 2008 Pages: 1545 - 1551