High focusing efficiency Fresnel zone plates for hard X-ray imaging is fabricated by electron beam lithography, soft X-ray lithography, and gold electroplating techniques. Using the electron beam lithography, Fresnel zone plates which has an outermost zone width of 100 nm and thickness of 250 nm has been fabricated. Fresnel zone plates with outermost zone width of 150 nm and thickness of 660 nm has been fabricated by using soft X-ray lithography.
PMMA High Aspect Ratio Diffraction Efficiency Zone Plate MIBK
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The authors would like to acknowledge Professor Changqing Xie and Dr. Deqiang Wang for their help and useful discussion. This work is supported by National Natural Science Foundation of China (No.10675113).
Burlion N et al (2006) X-ray microtomography Application to microstructure analysis of a cementitious material during leaching process. Cem Concr Res 36(2):346–357CrossRefGoogle Scholar
Cao Q et al (2004) Comprehensive focusing analysis of various Fresnel zone plates. J Opt Soc Am A 21(4):561–571CrossRefGoogle Scholar
Chao W et al (2005) Soft X-ray microscopy at a spatial resolution better than 15 nm. Nature 435:1210–1213CrossRefGoogle Scholar
Chrzas J et al (1994) Material optimization for hard X-ray Fresnel zone plates. SPIE 2011:108–117CrossRefGoogle Scholar
Denbeauxa G et al (2001) Soft X-ray microscopy to 25 nm with applications to biology and magnetic materials. Nucl Instrum Methods Phys Res A 467–468:841–844CrossRefGoogle Scholar
Divan R et al. (2002) Progress in the fabrication of high aspect ratio zone plates by soft X-ray lithography. SPIE 4783:82–91CrossRefGoogle Scholar