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Microsystem Technologies

, Volume 14, Issue 9–11, pp 1279–1284 | Cite as

The anomalous behavior and properties of Ni–Co films codeposited in the sulfamate-chloride electrolyte

  • C. K. ChungEmail author
  • R. X. Zhou
  • W. T. Chang
Technical Paper

Abstract

In this paper, we have studied the effect of controlled parameters on the anomalous behavior and property of the codeposited nickel-cobalt (Ni–Co) films in the complex sulfamate-chloride bath. The variation of current densities and temperature resulted in different Co atomic percentage (Co at%) of the deposited films as well as the morphology and microhardness. Co at% in Ni–Co films gradually decreased with increasing current density and temperatures with variation from approximately 25 to 15%. The Co participation could also inhibit grain growth of the deposited films. The Ni–Co film codeposited at lower current density or temperature would have the higher hard Co content and smaller grain which results in the higher microharness and smooth morphology.

Keywords

Deposition Rate Anomalous Behavior Vickers Microhardness Alloy Film Nickel Chloride 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

Notes

Acknowledgments

This work is partially sponsored by National Science Council under contract No 95-2622-E-006-012-CC3 and NSC 96-2622-E-006-007-CC3. We also would like to thank the Center for Micro/Nano Science and Technology and Center for Precious Instruments in National Cheng Kung University for the access of process and analysis equipments.

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Copyright information

© Springer-Verlag 2007

Authors and Affiliations

  1. 1.Department of Mechanical Engineering, Center for Micro/Nano Science and TechnologyNational Cheng Kung UniversityTainanTaiwan, ROC

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