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Microsystem Technologies

, Volume 14, Issue 9–11, pp 1299–1303 | Cite as

Reflectivity test of X-ray mirrors for deep X-ray lithography

  • V. NazmovEmail author
  • E. Reznikova
  • A. Last
  • M. Boerner
  • J. Mohr
Technical Paper

Abstract

The reflectivity of grazing angle X-ray mirrors, used for X-ray deep lithography, is tested by means of a calorimetric method. A deviation in the reflectivity of a used mirror compared with the reflectivity of a clean surface is observed. This deviation is caused by an oxide layer on the mirrors surfaces. The density, thickness and roughness of the assumed oxide layers are determined experimentally.

Keywords

Spectral Reflectivity Copper Foil Grazing Incidence Thick Polymer Layer Additional Spectral Component 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Springer-Verlag 2008

Authors and Affiliations

  • V. Nazmov
    • 1
    Email author
  • E. Reznikova
    • 1
  • A. Last
    • 1
  • M. Boerner
    • 1
  • J. Mohr
    • 1
  1. 1.Institut für MikrostrukturtechnikKarlsruhe University and Forschungszentrum KarlsruheKarlsruheGermany

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