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Applications of thick Sacrificial-Layer of zinc in LIGA process

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Abstract

Sacrificial-Layer technology is widely used in the microfabrication field of SLIGA. In this paper, thick sacrificial layers of zinc techniques are studied. A movable structure with aspect ratio of 25 has been fabricated by using zinc sacrificial layer through LIGA technique. Compared with conventional metal sacrificial layers of titanium or copper, the thickness of zinc layer can grow up to more than 10 μm. The adhesion of different seed layers and the physiognomy of sacrificial layer are also focused in this paper.

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Acknowledgment

This work has been supported partially by the LIGA End-Station of National Synchrotron Radiation Laboratory, People’s Republic of China.

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Authors and Affiliations

  1. National Synchrotron Radiation Laboratory, University of Science and Technology of China, 230029, Hefei, Anhui, People’s Republic of China

    XinLong Huang, Gang Liu, Xiong Ying, Jun Wang, Yuhua Guo, Chunlei Kang & Yangchao Tian

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  1. XinLong Huang
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  2. Gang Liu
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  3. Xiong Ying
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  4. Jun Wang
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  5. Yuhua Guo
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  6. Chunlei Kang
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  7. Yangchao Tian
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Correspondence to Yangchao Tian.

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Huang, X., Liu, G., Ying, X. et al. Applications of thick Sacrificial-Layer of zinc in LIGA process. Microsyst Technol 14, 1257–1261 (2008). https://doi.org/10.1007/s00542-007-0543-6

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  • DOI: https://doi.org/10.1007/s00542-007-0543-6

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