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Microsystem Technologies

, Volume 14, Issue 9–11, pp 1257–1261 | Cite as

Applications of thick Sacrificial-Layer of zinc in LIGA process

  • XinLong Huang
  • Gang Liu
  • Xiong Ying
  • Jun Wang
  • Yuhua Guo
  • Chunlei Kang
  • Yangchao TianEmail author
Technical Paper

Abstract

Sacrificial-Layer technology is widely used in the microfabrication field of SLIGA. In this paper, thick sacrificial layers of zinc techniques are studied. A movable structure with aspect ratio of 25 has been fabricated by using zinc sacrificial layer through LIGA technique. Compared with conventional metal sacrificial layers of titanium or copper, the thickness of zinc layer can grow up to more than 10 μm. The adhesion of different seed layers and the physiognomy of sacrificial layer are also focused in this paper.

Keywords

PMMA Seed Layer Sacrificial Layer Zinc Layer Nickel Structure 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

Notes

Acknowledgment

This work has been supported partially by the LIGA End-Station of National Synchrotron Radiation Laboratory, People’s Republic of China.

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Copyright information

© Springer-Verlag 2008

Authors and Affiliations

  • XinLong Huang
    • 1
  • Gang Liu
    • 1
  • Xiong Ying
    • 1
  • Jun Wang
    • 1
  • Yuhua Guo
    • 1
  • Chunlei Kang
    • 1
  • Yangchao Tian
    • 1
    Email author
  1. 1.National Synchrotron Radiation LaboratoryUniversity of Science and Technology of ChinaHefeiPeople’s Republic of China

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