Applications of thick Sacrificial-Layer of zinc in LIGA process
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Sacrificial-Layer technology is widely used in the microfabrication field of SLIGA. In this paper, thick sacrificial layers of zinc techniques are studied. A movable structure with aspect ratio of 25 has been fabricated by using zinc sacrificial layer through LIGA technique. Compared with conventional metal sacrificial layers of titanium or copper, the thickness of zinc layer can grow up to more than 10 μm. The adhesion of different seed layers and the physiognomy of sacrificial layer are also focused in this paper.
KeywordsPMMA Seed Layer Sacrificial Layer Zinc Layer Nickel Structure
This work has been supported partially by the LIGA End-Station of National Synchrotron Radiation Laboratory, People’s Republic of China.
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