Volume 18, Issue 7-8

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August 2012

Special issue of the conference 'Smart Sensors, Actuators and MEMS' within the SPIE EUROPE Symposium 'MICROTECHNOLOGIES' Prague, Czech Republic, 18-20 April 2011

43 articles in this issue

Special issue of the conference ‘Smart Sensors, Actuators and MEMS’, within the SPIE EUROPE Symposium ‘MICROTECHNOLOGIES’ Prague, Czech Republic, 18–20 April 2011
Ulrich Schmid
Thomas Becker
Bernd Michel
Editorial 25 March 2012 Pages: 833 - 833
Cleaning of structured templates from nanoparticle accumulation using silicone
S. Merzsch
H. S. Wasisto
E. Peiner
Technical Paper 16 November 2011 Pages: 835 - 842
Low-cost fiber-optic waveguide sensor for the colorimetric detection of ammonia
Katrin Schmitt
Jonas Rist
Jürgen Wöllenstein
Technical Paper 25 November 2011 Pages: 843 - 848
Thermopile-based THz antenna
Béla Szentpáli
Gábor Matyi
Tibor Berceli
Technical Paper 03 December 2011 Pages: 849 - 856
Nanowire silicon as a material for thermoelectric energy conversion
A. Stranz
J. Kähler
E. Peiner
Technical Paper 17 December 2011 Pages: 857 - 862
Platinated ultrathin films made of carbon nanotubes
Timo Bohnenberger
Frank Steinhäußer
Ulrich Schmid
Technical Paper 15 December 2011 Pages: 863 - 868
Fabrication, packaging, and characterization of p-SOI Wheatstone bridges for harsh environments
J. Kähler
A. Stranz
E. Peiner
Technical Paper 17 December 2011 Pages: 869 - 878
Long-term stability of Ag and Cu thin films on glass, LTCC and alumina substrates
A. Bittner
N. Pagel
U. Schmid
Technical Paper 17 December 2011 Pages: 879 - 884
Microfabricated self-resonant structure as a passive wireless dielectric constant and conductivity sensor
Sheng Zhang
Praveenkumar Pasupathy
Dean P. Neikirk
Technical Paper 29 December 2011 Pages: 885 - 891
Design and evaluation process of a robust pressure sensor for measurements in boundary layers of liquid fluids
T. Beutel
M. Leester-Schädel
S. Büttgenbach
Technical Paper 24 December 2011 Pages: 893 - 903
Determination of exposure to engineered carbon nanoparticles using a self-sensing piezoresistive silicon cantilever sensor
H. S. Wasisto
S. Merzsch
E. Peiner
Technical Paper 06 January 2012 Pages: 905 - 915
Selective modal excitation in coupled piezoelectric microcantilevers
M. Gil
T. Manzaneque
J. L. Sánchez-Rojas
Technical Paper 07 January 2012 Pages: 917 - 924
Metallo-porphyrin zinc as gas sensitive material for colorimetric gas sensors on planar optical waveguides
Carolin Peter
Katrin Schmitt
Juergen Woellenstein
Technical Paper 24 January 2012 Pages: 925 - 930
Micro harvester using isotropic charging of electrets deposited on vertical sidewalls for conversion of 3D vibrational energy
Ulrich Mescheder
Antwi Nimo
Awad Saad Abou Elkeir
Technical Paper 13 January 2012 Pages: 931 - 943
Measurement of Young’s modulus and residual stress of thin SiC layers for MEMS high temperature applications
Oliver Pabst
Michael Schiffer
Ha-Duong Ngo
Technical Paper 11 January 2012 Pages: 945 - 953
Hardware implementation of an electrostatic MEMS-actuator linearization
F. Mair
M. Egretzberger
A. Kugi
Technical Paper 14 January 2012 Pages: 955 - 963
Gold-based thin multilayers for ohmic contacts in RF-MEMS switches
V. Mulloni
J. Iannacci
B. Margesin
Technical Paper 06 January 2012 Pages: 965 - 971
Measurement technique for the thermal properties of thin-film diaphragms embedded in calorimetric flow sensors
Roman Beigelbeck
Samir Cerimovic
Franz Keplinger
Technical Paper 11 January 2012 Pages: 973 - 981
Role of the electro-thermo-mechanical multiple coupling on the operation of RF-microswitch
Eugenio Brusa
Mircea Gheorghe Munteanu
Technical Paper 24 January 2012 Pages: 983 - 995
Modelling and characterization of AlN-actuated microcantilevers vibrating in the first in-plane mode
V. Ruiz
J. Hernando-García
J. L. Sánchez-Rojas
Technical Paper 31 January 2012 Pages: 997 - 1001
Artificial intelligence based optimization for vibration energy harvesting applications
Zdenek Hadas
Jiri Kurfurst
Vladislav Singule
Technical Paper 07 February 2012 Pages: 1003 - 1014
New method for selectivity enhancement of SiC field effect gas sensors for quantification of NO_x
Christian Bur
Peter Reimann
Andreas Schütze
Technical Paper 07 February 2012 Pages: 1015 - 1025
Studies on SiC, DLC and TiO₂ thin films as piezoresistive sensor materials for high temperature application
M. A. Fraga
H. Furlan
C. F. R. Mateus
Technical Paper 31 January 2012 Pages: 1027 - 1033
Modeling the performance of a micromachined piezoelectric energy harvester
Ali B. Alamin Dow
M. Schneider
Nazir Kherani
Technical Paper 07 February 2012 Pages: 1035 - 1043
Sensing viscosity and density of glycerol–water mixtures utilizing a suspended plate MEMS resonator
Samir Cerimovic
Roman Beigelbeck
Franz Keplinger
Technical Paper Open access 07 February 2012 Pages: 1045 - 1056
Through wafer via holes manufacturing by variable isotropy Deep RIE process for RF applications
D. Vasilache
S. Colpo
B. Margesin
Technical Paper 07 February 2012 Pages: 1057 - 1063
CMOS: compatible wafer bonding for MEMS and wafer-level 3D integration
Viorel Dragoi
Eric Pabo
Gerald Mittendorfer
Technical Paper 07 February 2012 Pages: 1065 - 1075
MEMS-based microthruster with integrated platinum thin film resistance temperature detector (RTD), heater meander and thermal insulation for operation up to 1,000°C
Natsuki Miyakawa
Wolfgang Legner
Alois Friedberger
Technical Paper 10 February 2012 Pages: 1077 - 1087
Resonantly excited AlN-based microcantilevers for immunosensing
M. J. Oliver
J. Hernando-García
J. L. Sánchez-Rojas
Technical Paper 10 February 2012 Pages: 1089 - 1094
Micromechanical force sensors based on SU-8 resist
A. Jordan
S. Büttgenbach
Technical Paper 11 February 2012 Pages: 1095 - 1101
Multi-channel conical microstructures: perspectives
Sergey Sukhoveyev
Technical Paper 16 February 2012 Pages: 1103 - 1107
Novel 3D manufacturing method combining microelectrial discharge machining and electrochemical polishing
Claudia Richter
Thomas Krah
Stephanus Büttgenbach
Technical Paper 25 February 2012 Pages: 1109 - 1118
Cantilever probes for high speed AFM
C. Richter
P. Weinzierl
T. Sulzbach
Technical Paper 29 February 2012 Pages: 1119 - 1126
Hysteresis correction of tactile sensor response with a generalized Prandtl–Ishlinskii model
José A. Sánchez-Durán
Óscar Oballe-Peinado
Fernando Vidal-Verdú
Technical Paper 16 March 2012 Pages: 1127 - 1138
Modeling of gold microbeams as strain and pressure sensors for characterizing MEMS packages
A. Faes
G. Resta
B. Margesin
Technical Paper 04 March 2012 Pages: 1139 - 1145
A MEMS-based thermal infrared emitter for an integrated NDIR spectrometer
C. Calaza
M. Salleras
L. Fonseca
Technical Paper 04 March 2012 Pages: 1147 - 1154
Flexible and large area pressure sensors for human-neuroprostheses and human-neurorobotic interface assessment
J. Herrán
I. Fernández
J. L. Pons
Technical Paper 04 March 2012 Pages: 1155 - 1161
Integration of impedance spectroscopy sensors in a digital microfluidic platform
Thomas Lederer
Stefan Clara
Wolfgang Hilber
Technical Paper 09 March 2012 Pages: 1163 - 1180
Power supply sources based on resonant energy harvesting
P. Fiala
P. Drexler
Technical Paper 14 March 2012 Pages: 1181 - 1192
Smart ultrasonic sensors systems: potential of aluminum nitride thin films for the excitation of the ultrasound at high frequencies
Susan Walter
Thomas Herzog
Daniel Gloess
Technical Paper 01 April 2012 Pages: 1193 - 1199
Battery-and wire-less tire pressure measurement systems (TPMS) sensor
Noaman Makki
Remon Pop-Iliev
Technical Paper 30 March 2012 Pages: 1201 - 1212
Thin-film electro-acoustic sensors based on AlN and its alloys: possibilities and limitations
Gunilla Wingqvist
Technical Paper 05 June 2012 Pages: 1213 - 1223
Binary Zero-Power Sensors: an alternative solution for power-free energy-autonomous sensor systems
Thomas Frank
Gerald Gerlach
Arndt Steinke
Technical Paper Open access 15 June 2012 Pages: 1225 - 1231

Volume 18, Issue 7-8

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