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Modelling and characterization of AlN-actuated microcantilevers vibrating in the first in-plane mode

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Abstract

The characterization of the first in-plane mode of aluminum nitride-actuated piezoelectric microcantilevers was carried out by using electrical and optical techniques. The top electrode of the cantilever was specifically designed to allow for an efficient electrical actuation of these in-plane modes. In order to confirm the in-plane nature of the modal vibration, the detection of the electrically induced movement was performed optically with the help of a stroboscopic microscope. In parallel, resonances were also measured electrically by means of an impedance analyzer. The quality factor and the resonant frequencies of the in-plane modes were estimated from the corresponding measurement data when applying both detection techniques. Our results show quality factor values as high as 3,000 for the first in-plane mode in air.

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Acknowledgments

This work was supported by Junta de Comunidades de Castilla-LaMancha project no PEIC11-0022-7430 and Spanish Ministerio de Educación y Ciencia project no DPI2009- 07497.

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Authors and Affiliations

  1. Departamento de Ingeniería Eléctrica, Electrónica, Automática y Comunicaciones, Universidad de Castilla-La Mancha, 13071, Ciudad Real, Spain

    V. Ruiz, J. Hernando-García & J. L. Sánchez-Rojas

  2. Electronic Engineering Department, Hijjawi Faculty for Engineering Technology, Yarmouk University, 21163, Irbid, Jordan

    A. Ababneh

  3. Chair of Micromechanisc, Microuidics/Microactuators, Faculty of Natural Sciences and Technology II, Saarland University, 66123, Saarbrücken, Germany

    H. Seidel

  4. Department of Microsystems Technology, Institute of Sensor and Actuator Systems, Vienna University of Technology, 1040, Vienna, Austria

    U. Schmid

Authors
  1. V. Ruiz
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  2. J. Hernando-García
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  3. A. Ababneh
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  4. H. Seidel
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  5. U. Schmid
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  6. J. L. Sánchez-Rojas
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Correspondence to V. Ruiz.

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Ruiz, V., Hernando-García, J., Ababneh, A. et al. Modelling and characterization of AlN-actuated microcantilevers vibrating in the first in-plane mode. Microsyst Technol 18, 997–1001 (2012). https://doi.org/10.1007/s00542-012-1428-x

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  • DOI: https://doi.org/10.1007/s00542-012-1428-x

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