Abstract
This work is intended to describe the design aspects and to characterize the functionality of a novel thermopile structure applicable for detecting millimetre range and THz radiation. The proposed thermopile consists of a series of micromachined poly-crystalline silicon thermocouple strips arranged linearly. This device can act as a series of antennas; its antenna-like operation was demonstrated clearly by the strong polarization dependence when detecting microwave radiation. The sensing principle is similar to the basic operation of bolometers in that the absorbed radiation heats up the semiconductor strips, but the temperature increment is detected by the Seebeck effect instead of the resistance change. Therefore there is no read-out current and the voltage output starts from zero. In the present work we are going to show the simulation of the current distribution. The fabrication of the device will also be outlined, as well as the results of measurements performed at 13, 100 GHz, and both in broad-band THz and in infrared radiation.
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References
Cengel YA, Ghajar AJ (2010) Heat and mass transfer: fundamentals and applications, 4th edn. McGraw-Hill, New York
Chong N, Ahmed H (1997) Antenna-coupled polycrystalline silicon air-bridge thermal detector for mid-infrared radiation. Appl Phys Lett 71:1607–1609
Dijkstra M, Lammerink TSJ, de Boer MJ, Berenschot JW, Wiegerink RJ, Elwenspoek MC (2008) Low-drift U-shaped thermopile flow sensor. In: IEEE sensors 2008 Conference, pp 66–69, 1-4244-2581-5/08/$20.00 ©2008 IEEE
Graf A, Arndt M, Sauer M, Gerlach G (2007) Review of micromachined thermopiles for infrared detection. Meas Sci Technol 18:R59–R75
Kasalynas I, Adamta AJL, Klaassena T, Hovenid NJ, Pandraudc G, Iordanovtc VP, Sarro PM (2007) Some properties of a room temperature THz detection array. Proc of SPIE 6596:65960J. doi:10.1117/12.726404
Liddiard KC (1986) Thin-film resistance bolometer IR detectors-II. Infrared Phys 26(1):43–49
Mancarella F, Roncaglia A, Cardinali GC (2006) A measurement technique for thermoelectric power of CMOA layers at the wafer level. Sens Actuators A 132:289–295
Minkevicius L, Tamosiunas V, Kasalynas I, Seliuta D, Valusis G, Lisauskas A, Boppel S, Roskos HG, Kőhler K (2011) Terahertz heterodyne imaging with InGaAs-based bow-tie diodes. Appl Phys Lett 99:131101
Öjefors E, Lisauskas A, Glaab DG, Roskos HG, Pfeiffer UR (2009) Terahertz imaging detectors in CMOS technology. J Infrared Milli Terahz Waves 30:1269–1280. doi:10.1007/s10762-009-9569-4
Resnik D, Aljančič U, Vrtačnik D, Možek M, Amon S (2004) Mechanical stress in thin film microstructures on silicon substrate. Vacuum 73:623–628
Roncaglia A, Mancarella F, Cardinali GC (2007) CMOS-compatible fabrication of thermopiles with high sensitivity in the 3–5 μm atmospheric window. Sens Actuators B 125:214–223
Seidel H, Csepregi L, Heuberger A, Baumgärtel H (1990) Anisotropic etching of crystalline silicon in alkaline solutions. J Elchem Soc 137:3612–3625
Szabó PG, Székely V (2009) Characterization and modeling of electro-thermal MEMS structures. Microsyst Technol 15:1293–1301
Szentpáli B, Basa P, Fürjes P, Battistig G, Bársony I, Károlyi G, Berceli T, Rymanov V, Stöhr A (2010) Thermopile antennas for detection of millimeter waves. Appl Phys Lett 96:133507
Vázsonyi É, Vértesy Z, Tóth A, Szlufcik J (2003) Anisotropic etching of silicon in a two-component alkaline solution. J Micromech Microeng 13:165–169
Acknowledgments
The measurements at 100 GHz were made at the Universität Duisburg-Essen, with the kind help of Vitaly Rymanov and Prof. Andreas Stöhr. The measurements with the broadband impulse THz source were performed at DESY, Hamburg with the valuable help and contribution of Matthias Hoffman. Their contribution is gratefully acknowledged. The authors thank the careful revision of the manuscript to Mr. Ádám Szendrényi and the kind support of Mr. László Nagy at the EnerSys Hungária Kft. The work was supported by CNK 77843 TERASTART OTKA grant.
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Szentpáli, B., Matyi, G., Fürjes, P. et al. Thermopile-based THz antenna. Microsyst Technol 18, 849–856 (2012). https://doi.org/10.1007/s00542-011-1387-7
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DOI: https://doi.org/10.1007/s00542-011-1387-7