Volume 13, Issue 3-4

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February 2007

HARMST, High Aspect Ratio Micro Structure Technology Workshop, Gyenogju, Korea, 10-13 Jnue 2005 (This is the first of two issues)

32 articles in this issue

HARMST, High Aspect Ratio Micro Structure Technology Workshop, Gyenogju, Korea, 10–13 June 2005
Tai Hun Kwon
Bernd Michel
Editorial 18 July 2006 Pages: 207 - 207
Geometrical strengthening and tip-sharpening of a microneedle array fabricated by X-ray lithography
Sommawan Khumpuang
Mitsuhiro Horade
Susumu Sugiyama
Technical paper 30 May 2006 Pages: 209 - 214
Mask design compensation for sloped sidewall structures fabricated by X-ray lithography
Mitsuhiro Horade
Sommawan Khumpuang
Susumu Sugiyama
Technical paper 25 May 2006 Pages: 215 - 219
Fabrication of high aspect ratio nano gratings using SR lithography
Fumiki Kato
Shinya Fujinawa
Susumu Sugiyama
Technical Paper 27 June 2006 Pages: 221 - 225
Fabrication of microgratings on PMMA plate and curved surface by using copper mesh as X-ray lithography mask
Yigui Li
Susumu Sugiyama
Technical paper 10 June 2006 Pages: 227 - 230
High aspect ratio tapered hollow metallic microneedle arrays with microfluidic interconnector
Kabseog Kim
Jeong-Bong Lee
Technical Paper 11 July 2006 Pages: 231 - 235
High aspect ratio air core solenoid inductors using an improved UV-LIGA process with contrast enhancement material
Hong Lu
Brandon Pillans
Jeong-Bong Lee
Technical paper 30 May 2006 Pages: 237 - 243
SU-8 3D microoptic components fabricated by inclined UV lithography in water
Z. Ling
K. Lian
Technical paper 24 May 2006 Pages: 245 - 251
In situ fabrication of SU-8 movable parts by using PAG-diluted SU-8 as the sacrificial layer
Z. Ling
K. Lian
Technical paper 19 May 2006 Pages: 253 - 257
Processing-microstructure-resulting materials properties of LIGA Ni
K. Lian
J. C. Jiang
Z. G. Ling
Technical paper 19 May 2006 Pages: 259 - 264
Method for polymer hot embossing process development
Proyag Datta
Jost Goettert
Technical Paper 19 May 2006 Pages: 265 - 270
Design and fabrication of a SU-8 based electrostatic microactuator
Wen Dai
Kun Lian
Wanjun Wang
Technical Paper 11 July 2006 Pages: 271 - 277
Design and UV-LIGA microfabrication of an electro-statically actuated power relay
S. J. Jeong
W. Wang
Technical paper 30 May 2006 Pages: 279 - 286
Fabrication of a polymeric tapered HARMs array utilizing a low-cost nickel electroplated mold insert
In-Hyouk Song
Yoonyoung Jin
Pratul K. Ajmera
Technical Paper 17 May 2006 Pages: 287 - 291
Different methods for the fabrication of UV-LIGA molds using SU-8 with tapered de-molding angles
C. Fu
H. Huang
Technical paper 20 May 2006 Pages: 293 - 298
Effect of seed layer stress on the fabrication of monolithic MEMS microstructure
C. K. Chung
Y. J. Fang
C. H. Wang
Technical paper 18 July 2006 Pages: 299 - 304
Micro-specific design flow for tool-based microtechnologies
Albert Albers
Norbert Burkardt
Jochen Marz
Technical Paper 26 September 2006 Pages: 305 - 310
SU-8: promising resist for advanced direct LIGA applications for high aspect ratio mechanical microparts
J. Kouba
R. Engelke
D. Haase
Technical paper 07 July 2006 Pages: 311 - 317
Investigations on possibilities of inline inspection of high aspect ratio microstructures
Rainer Engelke
Gisela Ahrens
Gabi Grützner
Technical Paper 25 May 2006 Pages: 319 - 325
Direct LIGA service for prototyping: status report
B. Loechel
J. Goettert
Y. M. Desta
Technical Paper 22 August 2006 Pages: 327 - 334
A new removable resist for high aspect ratio applications
Matthias Schirmer
Doris Perseke
Bernd Loechel
Technical paper 19 May 2006 Pages: 335 - 338
Microlens fabrication using an etched glass master
P. Zhang
G. Londe
H. J. Cho
Technical Paper 24 May 2006 Pages: 339 - 342
Fabrication of RF MEMS variable capacitors by deep X-ray lithography and electroplating
Sven Achenbach
David Klymyshyn
Jürgen Mohr
Technical Paper 20 June 2006 Pages: 343 - 347
Structure quality in deep X-ray lithography applying commercial polyimide-based masks
Sven Achenbach
Martin Boerner
Yasunori Saotome
Technical Paper 10 June 2006 Pages: 349 - 353
Process conditions in X-ray lithography for the fabrication of devices with sub-micron feature sizes
Timo Mappes
Sven Achenbach
Juergen Mohr
Technical Paper 07 June 2006 Pages: 355 - 360
Fabrication of micro-gas chromatograph columns for fast chromatography
Abhinav Bhushan
Dawit Yemane
Jost Goettert
Technical Paper 20 June 2006 Pages: 361 - 368
A hybrid approach for fabrication of polymeric BIOMEMS devices
Varshni Singh
Yohannes Desta
Jost Goettert
Technical Paper 27 June 2006 Pages: 369 - 377
Large area micro hot embossing of Pyrex glass with GC mold machined by dicing
Masaharu Takahashi
Yoichi Murakoshi
Kohei Hasegawa
Technical Paper 24 May 2006 Pages: 379 - 384
Development of precision transfer technology of atmospheric hot embossing by ultrasonic vibration
Harutaka Mekaru
Osamu Nakamura
Tadashi Hattori
Technical paper 19 May 2006 Pages: 385 - 391
Fabrication of a spiral microcoil using a 3D-LIGA process
Harutaka Mekaru
Shinji Kusumi
Tadashi Hattori
Technical paper 06 July 2006 Pages: 393 - 402
Study of PMMA thermal bonding
Xuelin Zhu
Gang Liu
Yangchao Tian
Technical Paper 20 June 2006 Pages: 403 - 407
High aspect ratio air core solenoid inductors using an improved UV-LIGA process with contrast enhancement material
Hong Lu
Brandon Pillans
Jeong-Bong Lee
Erratum 25 August 2006 Pages: 409 - 409

Volume 13, Issue 3-4

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