Abstract
Since the early 1990s a variety of applications ranging from precision metallic, ceramic, or polymeric parts to complex devices for micro-fluidic and micro-optic applications have been discussed with the assumption that LIGA can either make a significant contribution or is the sole technology able to make these products. The question today is, have individual LIGA groups or even the entire LIGA community achieved this goal? Despite major investments, a lot of hard work from many students and researchers, and some promising “prototypes”, a true mass product made by direct LIGA, i.e., using X-ray lithography and electroplating, has still not entered the market. This paper will briefly present the current status of direct-LIGA technology and discuss some examples of commercialization efforts as well as prospects for high-volume production.
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Proceedings of the 9th International Conference on the Commercialization of Micro and Nano Systems held 29 August–2 September 2004 in Edmonton, Alberta, Canada are available and can be requested from http://www.mancef.org/coms2004.htm
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Acknowledgments
The authors would like to thank to all participants and contributors to this work, especially to co-workers from BESSY and CAMD, micro resist technology GmbH, and Micromotion GmbH.
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This work widely uses the contents of the poster presentation “Direct LIGA Service for Prototyping: a Status Report” at the high aspect ratio micro structure technology workshop HARMST 2005 held in Gyeongju (Republic of Korea), June 10–13, 2005.
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Loechel, B., Goettert, J. & Desta, Y.M. Direct LIGA service for prototyping: status report. Microsyst Technol 13, 327–334 (2007). https://doi.org/10.1007/s00542-006-0241-9
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DOI: https://doi.org/10.1007/s00542-006-0241-9