Abstract
LIGA processes have been developed generally in the 2.5D world. We introduced techniques of 3D X-ray lithography and worm injection molding with a unscrewing release mechanism, and succeeded in the development to three dimensions of LIGA process. We called this technology 3D-LIGA process, and came to be able to fabricate the plastic molded product with a spiral microstructure. Furthermore, we succeeded in the trial production of a spiral microcoil using 3D-LIGA process and metallization technique combining flat and smooth electroplating with a leveling agent and an isotropic chemical etching. The diameter of this microcoil was 0.5 mm and the length was 1 mm. The width of the Cu coil line was 10 μm, and the pitch was 20 μm. Moreover, we measured characteristics of this microcoil as an inductor. The inductance and the quality factor at the frequency of 1 GHz were 91 nH and 5.8, respectively. This is the first time successful fabrication of an electric device with a 3D form like a spiral microcoil using the 3D-LIGA process has been achieved.
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Acknowledgments
This research was executed as a part of “the local new consortium research-and-development enterprise” in which the New Industry Research Organization (NIRO) had been consigned by the Ministry of Economy, Trade and Industry of Japanese government until 2001–2004. Moreover, a part of this research received financial support of Ministry of Education, Culture, Sports, Science and Technology, Grant-in-Aid for Scientific Research on Priority Areas, 16078212, 2004.
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Mekaru, H., Kusumi, S., Sato, N. et al. Fabrication of a spiral microcoil using a 3D-LIGA process. Microsyst Technol 13, 393–402 (2007). https://doi.org/10.1007/s00542-006-0202-3
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DOI: https://doi.org/10.1007/s00542-006-0202-3