Abstract
Design of systems and components being produced with tool-based microtechnologies is strongly driven by technology. Thus, there are multitechnological influences from production, materials or micro-specific effects, which restrictively affect design and have to be considered. Under special regard of these peculiarities and in context with live cycle stages of tool-based microtechnological products, a design flow is presented. This incorporates a new design model, called sickle model visualizing the specific aspects when designing products of tool-based microtechnology. In order to support the design process, design rules are used to transfer knowledge from subsequent and adjacent life cycle stages to the current design stage.
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References
Albers A, Marz J (2003) Knowledge-based design environment for primary shaped micro parts. In: 5th international workshop on high aspect ratio micro-structure technology, HARMST 03
Albers A, Marz J (2004) Restrictions of production engineering on micro-specific product development. Microsyst Technol 10:205–210
Albers A, Marz J, Burkardt N (2003) Design methodology in micro technology. In: 14th international conference on engineering design, ICED 03
Albers A, Burkardt N, Hauser S, Marz J (2005) Knowledge-based engineering environment for primary shaped micro parts. Microsyst Technol 11:254–260
Deigendesch T (2004) Konstruktionsregeln als methodisches Hilfsmittel zur durchgängigen Unterstützung des Entwurfsprozesses in der Mikrotechnik. University of Karlsruhe (TH) diploma thesis
Hansen U, Germer C, Büttgenbach S, Franke HJ (2002) Rule based validation of processing sequences. In: 5th international conference on modeling and simulation of microsystems, MSM2002
Leßmöllmann C (1992) Fertigungsgerechte Gestaltung von Mikrostrukturen für die LIGA-Technik. University of Karlsruhe (TH) doctoral thesis
Marz J (2005) Mikrospezifischer Produktentwicklungsprozess (μPEP) für werkzeuggebundene Mikrotechniken. In: Albers A (ed) Forschungsberichte des Instituts für Produktentwicklung, Vol.17 (University of Karlsruhe (TH) doctoral thesis)
Marz J, Burkardt N, Albers A (2003) Methodological investigation of the product development in micro technology. In: 4th international topic conference, EUSPEN 03
Marz J, Burkardt N, Albers A (2004) Methodisch unterstützter Entwurf mechanischer Mikrosysteme. ETG-/GMM-Fachtagung: Innovative Klein- und Mikroantriebstechnik, VDE, Berlin: 63–67
Mead C, Conway L (1980) Introduction to VLSI systems. Addison-Wesley, Reading
Rabaey JM, Chandrakasan A, Nikolic B (2003) Digital integrated circuits—a design perspective, 2nd edn. Prentice Hall, New Jersey
Scherer KP, Buchberger P, Eggert H, Stiller P, Stucky U (1996) Knowledge based support for manufacturing of microstructures. Microsyst Technol 2:167–170
Solf C, Janssen A, Mohr J, Ruzzu A, Wallrabe U (2003) Incorporating design rules into the LIGA technology applied to a Fourier transformation spectrometer. Book of Abstracts HARMST ‘03
Acknowledgements
We are grateful for the support provided by the German Research Foundation (DFG) within the collaborative research center 499 “Development, production and quality assurance of primary shaped micro components from metallic and ceramic materials”.
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Albers, A., Burkardt, N., Deigendesch, T. et al. Micro-specific design flow for tool-based microtechnologies. Microsyst Technol 13, 305–310 (2007). https://doi.org/10.1007/s00542-006-0181-4
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DOI: https://doi.org/10.1007/s00542-006-0181-4