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Fabrication of microgratings on PMMA plate and curved surface by using copper mesh as X-ray lithography mask

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Abstract

We demonstrate experimentally the X-ray lithography technique to fabricate microgratings on a PMMA plate and on curved surfaces such as PMMA cylinder lens surfaces with X-ray lithography by copper mesh as mask. Some gratings with 12.7 μm pitches on the plate and on PMMA curved surface with large area (10 mm × 10 mm) by vertically moving or rotating the resist stage exposure are realized.

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References

  • Burge JH, Anderson DS, Milster TD, Vernold CL (1994) Measurement of a convex secondary mirror using a holographic test plat. Proc SPIE 2199:193–198

    Google Scholar 

  • Daly D (2001) Microlens arrays. Taylor & Francis, London

    Google Scholar 

  • Fu Y, Bryan N (2003) Investigation of diffractive optical element fabricated on diamond film by use of focused ion beam direct milling. Opt Eng 42:2214–2217

    Article  Google Scholar 

  • Harada T, Moriyama S, Kita T (1974) Mechanically ruled stigmatic concave gratings. Jpn J Appl Phys 14:175–179

    Google Scholar 

  • Kley E, Schnabel B, Zeitner U (1997) E-Beam lithography: an efficient tool for the fabrication of diffractive and micro optical elements. Proc SPIE 3008:222–228

    Google Scholar 

  • Xie Y, Lu Z, Li F, Zhao J, Weng Z (2002) Lithographic fabrication of large diffractive optical elements on a concave lens surface. Opt Express 10:1043–1047

    Google Scholar 

  • Yu WX, Yuan X-C, Ngo NQ, Que WX, Cheong WC, Koudriachov V (2002) Single-step fabrication of continuous surface relief micro-optical elements in hybrid sol-gel glass by laser direct writing. Opt Express 10:443–448

    Google Scholar 

Download references

Acknowledgements

This work was supported by the Kyoto Nano Cluster Project in Japan and by NFSC Foundation (grant number 60377014) of China.

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Authors and Affiliations

  1. Research Organization of Science and Engineering, Ritsumeikan University, 525-8577, Kusatsu, Japan

    Yigui Li

  2. Institute of Micro-nano Science and Technology, Shanghai Jiaotong University, 200030, Shanghai, China

    Yigui Li

  3. Department of Micro System Technology, Ritsumeikan University, Kusatsu, Japan

    Susumu Sugiyama

Authors
  1. Yigui Li
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  2. Susumu Sugiyama
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Correspondence to Yigui Li.

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Li, Y., Sugiyama, S. Fabrication of microgratings on PMMA plate and curved surface by using copper mesh as X-ray lithography mask. Microsyst Technol 13, 227–230 (2007). https://doi.org/10.1007/s00542-006-0196-x

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  • DOI: https://doi.org/10.1007/s00542-006-0196-x

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