Skip to main content
SpringerLink
Log in

Fabrication of micro-gas chromatograph columns for fast chromatography

  • Technical Paper
  • Published:
Microsystem Technologies Aims and scope Submit manuscript

Abstract

Gas chromatography (GC) is one of the most widespread techniques used in laboratories as a way to separate and analyze complex mixtures of volatile and semi-volatile compounds. The main advantage of miniaturization of these systems is the increased performance due to the reduced time for analysis and reduced fabrication cost of the complex pneumatic flow system. In this paper advanced design ideas and fabrication processes to facilitate integration of the sample concentrator and the column will be presented. Using the LIGA process, 0.5- and 2-m-long, 50-μm-wide, and up to 600-μm-high aspect ratio metal GC separation columns with on-chip integrated sample injection and detection were fabricated. Initial experiments of coating these high aspect ratio columns show promising results when compared to simple tubular columns.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Fig. 1
Fig. 2
Fig. 3
Fig. 4
Fig. 5
Fig. 6
Fig. 7
Fig. 8
Fig. 9
Fig. 10
Fig. 11
Fig. 12
Fig. 13

Similar content being viewed by others

Notes

  1. State-of-the-art GC instruments are built by a number of companies, for example, SRI Instruments, Torrance, CA, USA ( http://www.srigc.com), Agilent Technologies, USA (http://www.chem.agilent.com), Perkin Elmer, USA (http://www.perkinelmer.com), and Varian Inc., Palo Alto, CA, USA (http://www.varianinc.com)

  2. DARPA’s MGA is supporting research for this group of compounds: http://www.darpa.mil/mto/mga/.

  3. http://www.sls-micro-technology.de/.

  4. http://www.ca.sandia.gov/chembio/tech_projects/detection/micro-chem-lab.html.

  5. http://www.microfastgc.com.

  6. Fabrication and testing of micro-gas chromatograph columns, Poster presentation at HARMST 2003, Monterey, CA.

References

  • Bhushan A, Yemane D, Goettert J, Overton EB, Murphy MC (2004a) Fabrication and testing of high aspect ratio metal micro-gas chromatograph columns. In: Proceedings of ASME international mechanical engineering congress & expo, Anaheim, 13–19 November 2004

  • Bhushan A, Challa V, McKeon J, Yemane D, Overton EB, Murphy MC, Goettert J (2004b) Application of scanning acoustic microscopy in characterizing metal micro gas chromatograph columns. TMS Lett 1(7):145–146

    Google Scholar 

  • Blumberg LM, Klee MS (2001) Quantitative comparison of performance of isothermal and temperature-programmed gas chromatography. J Chromatogr A 933(1–2):13–26

    Article  Google Scholar 

  • Golay JME (1981) The height equivalent to a theoretical plate or retentionless rectangular tubes. J Chromatogr A 216:1–8

    Article  Google Scholar 

  • Grob RL (1995) Modern practice of gas chromatography. Wiley, New York

    Google Scholar 

  • Ho CM, Tai YC (1998) Micro-electro-mechanical-systems (MEMS) and fluid flows. Annu Rev Fluid Mech 30:579–612

    Article  Google Scholar 

  • Hudson ML, Kottenstette R, Matzke CM, Frye-Mason GC, Shollenberger KA, Adkins DR, Wong CC (1998) Design, testing and simulation of microscale gas chromatography columns, vol. DSC-66. Proc ASME IMECE, pp 207–214

  • Kolesar ES, Reston RR (1996) Design and fabrication of the fundamental components integrated to realize a functional silicon micromachined gas chromatography system, vol. DSC-59. Proc ASME IMECE, pp 11–17

  • Lambertus G, Elstro A, Sensenig K, Potkay J, Agah M, Scheuering S, Wise K, Dorman K, Sacks R (2004) Design, fabrication and evaluation of microfabricated columns for gas chromatography. Anal Chem 76(9):2629–2637

    Article  Google Scholar 

  • Noh HS, Hesketh PJ, Frye-Mason GC (2002) Parylene gas chromatographic column for rapid thermal cycling. J Microelectromech Syst 11(6):718–725

    Article  Google Scholar 

  • Paegel LH, Simpson P, Mathies R (2000) Turn geometry for minimizing band broadening in microfabricated capillary electrophoresis channels. Anal Chem 72(14):3030–3037

    Article  Google Scholar 

  • Spangler GE (1998) Height equivalent to a theoretical plate theory for rectangular GC columns. Anal Chem 70(22):4805–4816

    Article  Google Scholar 

  • Sumpter RS, Lee ML (1991) Enhanced radial dispersion in open tubular column chromatography. J Microcolumn Sep 3:91–113

    Article  Google Scholar 

  • Terry SC, Herman JC (1979) A gas chromatographic air analyzer fabricated on a silicon wafer. IEEE Trans Electron Devices 26:1880–1886

    Google Scholar 

  • Whiting JJ, Lu CJ, Zellers ET, Sacks RD (2001) A portable, high-speed, vacuum-outlet GC vapor analyzer employing air as carrier gas and surface acoustic wave detection. Anal Chem 73(19):4668–4675

    Article  Google Scholar 

Download references

Acknowledgments

The authors acknowledge funding support from the DARPA MGA program. Cleanroom and X-ray exposure support from the CAMD service group is appreciated. Special thanks to Restek Corporation for their help with coating the columns, Sonix Inc. for performing acoustic microscopy, and Orhan Kizilkaya at CAMD for conducting the IR analysis. Finally, the support of our colleagues at Sandia National Laboratories, Albuquerque, is greatly appreciated.

Author information

Authors and Affiliations

  1. Center for Advanced Microstructures and Devices (CAMD), Louisiana State University, Baton Rouge, LA, USA

    Abhinav Bhushan, Dawit Yemane & Jost Goettert

  2. Sandia National Laboratories, Albuquerque, NM, USA

    Dan Trudell

  3. Department of Environmental Studies, Louisiana State University, Baton Rouge, LA, USA

    Edward B. Overton

Authors
  1. Abhinav Bhushan
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Dawit Yemane
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. Dan Trudell
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. Edward B. Overton
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. Jost Goettert
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to Abhinav Bhushan.

Rights and permissions

Reprints and permissions

About this article

Cite this article

Bhushan, A., Yemane, D., Trudell, D. et al. Fabrication of micro-gas chromatograph columns for fast chromatography. Microsyst Technol 13, 361–368 (2007). https://doi.org/10.1007/s00542-006-0210-3

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s00542-006-0210-3

Keywords

Search

Navigation