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Microlens fabrication using an etched glass master

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Abstract

This paper presents a micromachining technique to fabricate microlenses using an etched glass master. The isotropic etching profile of the glass master was utilized for microlens replication. The master was treated by C4F8 plasma to form a conformal anti-adhesion layer. Lens arrays were replicated on polymer substrates by hot embossing. Microlenses with a large numerical aperture could be fabricated with this method. This work facilitates and simplifies fabrication steps for microlenses.

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Acknowledgments

The authors thank National Science Foundation (CAREER ECS-0348603 and MRI ECS-0521497) for its support in this work.

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Authors and Affiliations

  1. Department of Mechanical, Materials and Aerospace Engineering, University of Central Florida, Orlando, FL, 32816, USA

    P. Zhang & H. J. Cho

  2. Department of Electrical Engineering, University of Central Florida, Orlando, FL, 32816, USA

    G. Londe

  3. College of Optics and Photonics, University of Central Florida, Orlando, FL, 32816, USA

    J. Sung & E. Johnson

  4. Applied Chemical Engineering, Chonnam National University, Gwangju, 500-757, South Korea

    M. Lee

Authors
  1. P. Zhang
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  2. G. Londe
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  3. J. Sung
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  4. E. Johnson
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  5. M. Lee
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  6. H. J. Cho
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Corresponding author

Correspondence to P. Zhang.

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Zhang, P., Londe, G., Sung, J. et al. Microlens fabrication using an etched glass master. Microsyst Technol 13, 339–342 (2007). https://doi.org/10.1007/s00542-006-0217-9

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  • DOI: https://doi.org/10.1007/s00542-006-0217-9

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