Volume 16, Issue 5

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May 2010

Special Issue of the Conference ‘Smart Sensors, Actuators and MEMS’, within the SPIE Europe Symposium ‘Microtechnologies for the New Millennium’ Dresden, Germany, 4–6 May 2009

28 articles in this issue

Special Issue of the Conference ‘Smart Sensors, Actuators and MEMS’, within the SPIE Europe Symposium ‘Microtechnologies for the New Millennium’ Dresden, Germany, 4–6 May 2009
Thomas Becker
Ulrich Schmid
Bernd Michel
Editorial 09 March 2010 Pages: 655 - 655
Vibration energy scavenging via piezoelectric bimorphs of optimized shapes
Denis Benasciutti
Luciano Moro
Eugenio Brusa
Technical Paper 30 December 2009 Pages: 657 - 668
Growth of ZnO nanorods on patterned templates for efficient, large-area energy scavengers
G. Niarchos
E. Makarona
C. Tsamis
Technical Paper 12 February 2010 Pages: 669 - 675
Magnetic resonant harvesters and power management circuit for magnetic resonant harvesters
Tomáš Jirků
Pavel Fiala
Martin Kluge
Technical Paper 18 February 2010 Pages: 677 - 690
Power sensitivity of vibration energy harvester
Zdenek Hadas
Cestmir Ondrusek
Vladislav Singule
Technical Paper 06 February 2010 Pages: 691 - 702
Piezoresistive biochemical sensors based on hydrogels
Margarita Guenther
Gerald Gerlach
Thomas Wallmersperger
Technical Paper 20 December 2009 Pages: 703 - 715
Gel-based biochip for the detection of airborne contaminants
Katrin Schmitt
Gerd Sulz
Andreas Holländer
Technical Paper 29 December 2009 Pages: 717 - 722
Manufacturing, assembling and packaging of miniaturized neural implants
Thomas Stieglitz
Technical Paper 03 February 2010 Pages: 723 - 734
Adsorption–desorption noise in plasmonic chemical/biological sensors for multiple analyte environment
Olga Jakšić
Zoran Jakšić
Jovan Matović
Technical Paper 07 February 2010 Pages: 735 - 743
Fast transient temperature operating micromachined emitter for mid-infrared optical gas sensing systems: design, fabrication, characterization and optimization
J. Hildenbrand
C. Peter
J. Wöllenstein
Technical Paper 23 February 2010 Pages: 745 - 754
A comparative analyze of fundamental noise in cantilever sensors based on lateral and longitudinal displacement: case of thermal infrared detectors
Jovan Matović
Zoran Jakšić
Technical Paper 07 March 2010 Pages: 755 - 763
Tactile sensors based on conductive polymers
Julián Castellanos-Ramos
Rafael Navas-González
Fernando Vidal-Verdú
Technical Paper 05 December 2009 Pages: 765 - 776
A dynamical envelope model for vibratory gyroscopes
Markus Egretzberger
Andreas Kugi
Technical Paper 25 December 2009 Pages: 777 - 786
MEMS fluxgate magnetometer for parallel robot application
Maren Ramona Kirchhoff
Stephanus Büttgenbach
Technical Paper 25 December 2009 Pages: 787 - 790
High-resolution eddy current sensor system for quality assessment of carbon fiber materials
Martin H. Schulze
Henning Heuer
Norbert Meyendorf
Technical Paper 12 February 2010 Pages: 791 - 797
Adhesive wafer bonding with photosensitive polymers for MEMS fabrication
Erkan Cakmak
Viorel Dragoi
Eric Pabo
Technical Paper 19 December 2009 Pages: 799 - 808
Influence of a chip scale package on the frequency response of a MEMS microphone
Matthias Winter
Gregor Feiertag
Helmut Seidel
Technical Paper 25 December 2009 Pages: 809 - 815
Flip chip packaging for MEMS microphones
Gregor Feiertag
Matthias Winter
Anton Leidl
Technical Paper 06 February 2010 Pages: 817 - 823
Study on microstructural, chemical and electrical properties of tantalum nitride thin films deposited by reactive direct current magnetron sputtering
Michaela Grosser
M. Münch
U. Schmid
Technical Paper 08 January 2010 Pages: 825 - 836
Analysis of the quality factor of AlN-actuated micro-resonators in air and liquid
Tomás Manzaneque
J. Hernando
J. L. Sánchez-Rojas
Technical Paper 01 January 2010 Pages: 837 - 845
Robust miniaturized amplification unit for piezoelectric actuators: comparison of single crystal silicon and superelastic nickel titanium as membrane materials
Christian Bolzmacher
Karin Bauer
Helmut Seidel
Technical Paper 05 January 2010 Pages: 847 - 853
Characterization and displacement control of low surface-stress AlN-based piezoelectric micro-resonators
Jorge Hernando
Jose Luis Sánchez-Rojas
Helmut Seidel
Technical Paper 08 January 2010 Pages: 855 - 861
Shallow and deep dry etching of silicon using ICP cryogenic reactive ion etching process
Ü. Sökmen
A. Stranz
A. Waag
Technical Paper 05 February 2010 Pages: 863 - 870
What happens turning a 250-μm-thin piezo-stack sideways?
Sandy Zaehringer
Norbert Schwesinger
Technical Paper 09 March 2010 Pages: 871 - 877
Novel measurement and monitoring system for forming processes based on piezoresistive thin film systems
Saskia Biehl
Sebastian Staufenbiel
André Albert
Technical Paper 13 March 2010 Pages: 879 - 883
Single crystalline silicon based surface micromachining for high precision inertial sensors: technology and design for reliability
R. Knechtel
Technical Paper 09 March 2010 Pages: 885 - 893
Design of self-assembling micromirror arrays for light guiding applications
Qingdang Li
Andreas Jäkel
Hartmut Hillmer
Technical Paper 29 December 2009 Pages: 895 - 899
MOEMS translatory actuator characterisation, position encoding and closed-loop control
M. Lenzhofer
A. Tortschanoff
A. Kenda
Technical Paper 05 February 2010 Pages: 901 - 907

Volume 16, Issue 5

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