Skip to main content
SpringerLink
Log in

Design of self-assembling micromirror arrays for light guiding applications

  • Technical Paper
  • Published:
Microsystem Technologies Aims and scope Submit manuscript

Abstract

We present the design and the potential of actuable micromirror arrays for light guiding applications on large areas. These micromirror arrays are intended to be implemented into the windows of buildings and to provide functionalities like daylight guiding into rooms, heat regulation, and glare protection. Placed between two panes of a window, these mirrors are maintenance-free and not subject to defilement. The use of micro system technology on large areas requires very low cost processes and materials, a concept with a minimum of process steps, as well as very easy and reliable process control. We present our design approaches and the corresponding technological results.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Fig. 1
Fig. 2
Fig. 3
Fig. 4
Fig. 5
Fig. 6
Fig. 7
Fig. 8

Similar content being viewed by others

References

  • Kovacs GTA (2003) Micromachined transducers sourcebook. Science Press and McGraw-Hill Education (Asia) Co., Beijing

  • Li Q, Jäkel A, Viereck V, Schmid J, Hillmer H (2009) Design and fabrication of self-assembling micromirror arrays. Proc SPIE 7362:11.1–11.8

    Google Scholar 

  • Liu H (1979) Material Mechanik. People’s Education Press, Beijing

    Google Scholar 

  • Miles M (1999) MEMS-based interferometric modulator for display applications. Proc SPIE 3876:20–28

    Article  Google Scholar 

  • Pizzi M, Koniachkine V, Nieri M et al (2003) Electrostatically driven film light modulators for display applications. Microsyst Technol 10:17–21

    Article  Google Scholar 

  • Senturia D (2003) Microsystem design. Kluwer, Norwell

    Google Scholar 

  • Timoshenko S, Woinowsky-Krieger S (1987) Theory of plates and shells, 2nd edn. McGraw-Hill Book Company, Inc, New York

    Google Scholar 

  • Viereck V, Li Q, Ackermann J, Jäkel A, Bartels M, Schmid J, Hillmer H (2008) Nanophotonic mirror arrays for light steering. In: Proceedings of the eleventh Vietnamese–German seminar on physics and engineering, p 5

  • Waldis S, Zamkotsian F, Ayyalasomayajula P et al (2007) Micromirrors for multiobject spectroscopy. In: Proceedings of international IEEE conference on optical MEMs and nanophotonics, pp 87–88

Download references

Acknowledgments

Special thanks to the “Deutsche Bundesstiftung Umwelt” (DBU) for supporting the project. Thanks to all members of the Technological Electronics Group, the Efficient Energy Conversion Group and the “Von Waitzische Beteiligungen GbR” for stimulating discussions and technological support.

Author information

Authors and Affiliations

  1. Institute of Nanostructure Technologies and Analytics (INA) and Center for Interdisciplinary Nanostructure Science and Technology (CINSaT), University of Kassel, Heinrich-Plett-Str. 40, 34132, Kassel, Germany

    Qingdang Li, Andreas Jäkel, Volker Viereck & Hartmut Hillmer

Authors
  1. Qingdang Li
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Andreas Jäkel
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. Volker Viereck
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. Hartmut Hillmer
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to Qingdang Li.

Rights and permissions

Reprints and permissions

About this article

Cite this article

Li, Q., Jäkel, A., Viereck, V. et al. Design of self-assembling micromirror arrays for light guiding applications. Microsyst Technol 16, 895–899 (2010). https://doi.org/10.1007/s00542-009-1001-4

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s00542-009-1001-4

Keywords

Search

Navigation