Abstract
ZnO nanostructures were grown on patterned Si substrates using a cost-efficient, low-temperature process, for their future exploitation as functional cores of nanopiezotronic applications. Different substrates and growth parameters were examined in order to determine the optimum process window that will constitute a reliable, low-cost method for large-scale ZnO nanorod production. Statistical analysis was performed to assess the size and shape distribution of the nanorods in an effort to determine the energy conversion efficiency of the resulting structures.
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References
Ahmad U, Al-Hajry A, Hahn YB, Kim DH (2009) Rapid synthesis and dye-sensitized solar cell applications of hexagonal-shaped ZnO nanorods. Electrochim Acta 54:5358–5362
Cui JB, Daghlian CP, Gibson UJ, Pusche R, Geithner P, Ley L (2005) Low-temperature growth and field emission of ZnO nanowire arrays. J Appl Phys 97:044315
Farmakis FV, Speliotis Th, Alexandrou KP, Tsamis C, Kompitsas C, Fasaki I, Jedrasik P, Petersson G, Nilsson B (2008) Field-effect transistors with thin ZnO as active layer for gas sensor applications. Microelectron Eng 85:1035–1038
Greene LE, Yuhas BD, Law M, Zitoun D, Yang P (2006) Solution-grown zinc oxide nanowires. Inorg Chem 45(19):7535–7543
Kwon SS, Hong WK, Jo G, Maeng J, Kim TW, Song S, Lee T (2008) Piezoelectric effect on the electronic transport characteristics of ZnO nanowire field-effect transistors on bent flexible substrates. Adv Mater 20(23):4557–4562
Law M, Greene LE, Johnson JC, Saykally R, Yang P (2005) Nanowire dye-sensitized solar cells. Nat Mat 4:455–459
Lim JH, Kang CK, Kim KK, Park IK, Hwang DK, Park SJ (2006) UV electroluminescence emission from ZnO light-emitting diodes grown by high-temperature radiofrequency sputtering. Adv Mater 18(20):2720–2724
Makarona E, Speliotis T, Niarchos G, Niarchos D, Tsamis C (2008) ZnO nanorod growth based on a low-temperature silicon-compatible combinatorial method. Phys Stat Sol C 5(12):3809–3812
Niarchos G, Makarona E, Tsamis C (2009a) Growth of ZnO nanorods on patterned templates for energy harvesting applications. Proc SPIE 7362:73621L-1
Niarchos G, Makarona E, Tsamis C (2009b) Modeling and optimization of ZnO nanostructure arrays for improved energy conversion efficiency. Presented at the 3rd international conference on one-dimensional nanomaterials (ICON) on December 7–9. Georgia Institute of Technology, Atlanta
Vayssieres L (2004) On the design of advanced metal oxide nanomaterials. Int J Nanotechnol 1(1/2):1–41
Wang ZL (2008) Towards self-powered nanosystems: from nanogenerators to nanopiezotronics. Adv Funct Mater 18:1–15
Wang ZL, Song JH (2006) Piezoelectric nanogenerators based on zinc oxide nanowire arrays. Science 312:242–246
Wang X, Zhou J, Song J, Liu J, Ningsheng X, Wang ZL (2006) Piezoelectric field effect transistor and nanoforce sensor based on a single ZnO nanowire. Nano Lett 6(12):2768–2772
Xu S, Lao G, Weintraub B, Wang ZL (2008) Density controlled growth of aligned ZnO nanowire arrays by seedless chemical approach on smooth surfaces. J Mater Res 23(8):2072–2077
Yong Q, Xudong W, Zhong Lin W (2008) Microfibre–nanowire hybrid structure for energy scavenging. Nature 451:809–813
Acknowledgments
The research is funded by National Funds and the European Regional Development Fund in the framework of NSRF 2007–2013, contract no. 45. The authors would like to thank Dr. Th. Speliotis for preparation of ZnO films and E. Linarakis for assistance with the SEM measurements.
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Niarchos, G., Makarona, E. & Tsamis, C. Growth of ZnO nanorods on patterned templates for efficient, large-area energy scavengers. Microsyst Technol 16, 669–675 (2010). https://doi.org/10.1007/s00542-010-1030-z
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DOI: https://doi.org/10.1007/s00542-010-1030-z