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Active Probe Atomic Force Microscopy

A Practical Guide on Precision Instrumentation

  • Textbook
  • © 2024

Overview

Authors:
  1. Fangzhou Xia

    1. Mechanical Engineering Department, Physics Department, Massachusetts Institute of Technology, Cambridge, USA

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  2. Ivo W. Rangelow

    1. Production and Precision Metrology, Ilmenau University of Technology, Ilmenau, Germany

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  3. Kamal Youcef-Toumi

    1. Mechanical Engineering Department, Massachusetts Institute of Technology, Cambridge, USA

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  • Presents the instrument design details of atomic force microscopy with focus on active cantilever probes
  • Includes examples and exercises to boost understanding of AFM subsystem design, fabrication and integration
  • Imparts a hands-on curriculum for precision mechatronics and instrumentation with AFM and digital twin simulators

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Table of contents (11 chapters)

  1. Front Matter

    Pages i-xxiv
    Download chapter PDF

  2. Introduction to Atomic Force Microscopy

    • Fangzhou Xia, Ivo W. Rangelow, Kamal Youcef-Toumi
    Pages 1-23

  3. Nanoscale Force and Displacement Sensing

    • Fangzhou Xia, Ivo W. Rangelow, Kamal Youcef-Toumi
    Pages 25-53

  4. Cantilever Mechanics and Deflection Sensing

    • Fangzhou Xia, Ivo W. Rangelow, Kamal Youcef-Toumi
    Pages 55-83

  5. Nanoscale Actuation and Active AFM Probe Design Examples

    • Fangzhou Xia, Ivo W. Rangelow, Kamal Youcef-Toumi
    Pages 85-108

  6. Nanofabrication of AFM Cantilever Probes

    • Fangzhou Xia, Ivo W. Rangelow, Kamal Youcef-Toumi
    Pages 109-150

  7. AFM Probe Functionalization and Active Element Fabrication

    • Fangzhou Xia, Ivo W. Rangelow, Kamal Youcef-Toumi
    Pages 151-169

  8. AFM Nano-Positioning System Design

    • Fangzhou Xia, Ivo W. Rangelow, Kamal Youcef-Toumi
    Pages 171-226

  9. AFM Electronics and Signal Processing

    • Fangzhou Xia, Ivo W. Rangelow, Kamal Youcef-Toumi
    Pages 227-248

  10. AFM Imaging Control and System Integration

    • Fangzhou Xia, Ivo W. Rangelow, Kamal Youcef-Toumi
    Pages 249-285

  11. Active Probe AFM Imaging and Nanofabrication

    • Fangzhou Xia, Ivo W. Rangelow, Kamal Youcef-Toumi
    Pages 287-328

  12. Educational AFM and Curriculum Design

    • Fangzhou Xia, Ivo W. Rangelow, Kamal Youcef-Toumi
    Pages 329-364

  13. Back Matter

    Pages 365-366
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Keywords

About this book

From a perspective of precision instrumentation, this book provides a guided tour to readers on exploring the inner workings of atomic force microscopy (AFM). Centered around AFM, a broad range of mechatronic system topics are covered including mechanics, sensors, actuators, transmission design, system identification, signal processing, dynamic system modeling, controller. With a solid theoretical foundation, practical examples are provided for AFM subsystem level design on nano-positioning system, cantilever probe, control system and system integration. This book emphasizes novel development of active cantilever probes with embedded transducers, which enables new AFM capabilities for advanced applications. Full design details of a low-cost educational AFM and a Scale Model Interactive Learning Extended Reality (SMILER) toolkit are provided, which helps instructors to make use of this book for curriculum development. This book aims to empower AFM users with deeper understanding of theinstrument to extend AFM functionalities for advanced state-of-the-art research studies. Going beyond AFM, materials presented in this book are widely applicable to precision mechatronic system design covered in many upper-level graduate courses in mechanical and electrical engineering to cultivate next generation instrumentalists.

Authors and Affiliations

  • Mechanical Engineering Department, Physics Department, Massachusetts Institute of Technology, Cambridge, USA

    Fangzhou Xia

  • Production and Precision Metrology, Ilmenau University of Technology, Ilmenau, Germany

    Ivo W. Rangelow

  • Mechanical Engineering Department, Massachusetts Institute of Technology, Cambridge, USA

    Kamal Youcef-Toumi

About the authors

Fangzhou Xia is a Research Scientist, jointly appointed in the of Mechanical Engineering Department and Physics Department at the Massachusetts Institute of Technology. He received his Ph.D. in Mechanical Engineering from Massachusetts Institute of Technology (MIT), Cambridge, MA, USA, in 2020. His research interests include precision mechatronics, physical/computational intelligence, controls, nano-robotics, and instrumentation with applications in scanning probe microscopy, biomedical devices, and industrial automation. 

Dr. Ivo W. Rangelow is a University Professor in the Production and Precision Metrology Department at Ilmenau University of Technology. He received his Ph.D. with “summa cum laude” from Wroclaw University of Technology, Poland, in 1982. His research interests include nanofabrication, semiconductor devices, vacuum microelectronics, embedded systems, transducer technology, and scanning probe sciences. 

Dr. Kamal Youcef-Toumiis a Professor in the Department of Mechanical Engineering at the Massachusetts Institute of Technology. He received his Sc.D. degree in Mechanical Engineering from the Massachusetts Institute of Technology (MIT), Cambridge, MA, USA, in 1985. His research interests include modeling, design, instrumentation, control theory and their applications to dynamic systems.



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