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Cantilever Mechanics and Deflection Sensing

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Active Probe Atomic Force Microscopy

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Abstract

This chapter provides a comprehensive discussion of the principles behind nanoscale sensing, with a specific focus on the measurement of atomic force microscopy (AFM) cantilever deflections. Initially, the mechanics of the cantilever, a critical component that links internal stress and strain with the deflection, are derived in detail. A combination of these mechanics and sensing principles, as elucidated in Chap. 2, gives rise to principles that are aptly suited for AFM cantilever deflection sensing, as demonstrated by numerous examples. Traditional cantilever deflection sensing is accomplished primarily through external methods, such as the optical beam deflection system. However, advancements in nanofabrication techniques have led to the creation of microcantilever probes equipped with embedded sensing elements. It is important to note that algorithms for signal processing that employ data obtained from these sensors in dynamic mode operations will be expounded upon in Chap. 2.

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Authors and Affiliations

  1. Mechanical Engineering Department, Physics Department, Massachusetts Institute of Technology, Cambridge, MA, USA

    Fangzhou Xia

  2. Production and Precision Metrology, Ilmenau University of Technology, Ilmenau, Germany

    Ivo W. Rangelow

  3. Mechanical Engineering Department, Massachusetts Institute of Technology, Cambridge, MA, USA

    Kamal Youcef-Toumi

Authors
  1. Fangzhou Xia
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  2. Ivo W. Rangelow
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  3. Kamal Youcef-Toumi
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Xia, F., Rangelow, I.W., Youcef-Toumi, K. (2024). Cantilever Mechanics and Deflection Sensing. In: Active Probe Atomic Force Microscopy. Springer, Cham. https://doi.org/10.1007/978-3-031-44233-9_3

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