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Nanoscale Actuation and Active AFM Probe Design Examples

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Active Probe Atomic Force Microscopy

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Abstract

This chapter focuses on suitable actuation methodologies for driving AFM cantilevers, along with design examples of active AFM probes with integrated sensing and actuation elements. Similar to sensing, actuation of the cantilever probe can be achieved through both external and internal means. The primary requirement for dynamic mode operation is excitation of the cantilever resonance. Some actuation strategies can also allow control over static deflection. To conclude, the chapter showcases examples of AFM cantilever probes built using combinations of embedded self-sensing and self-actuated methods.

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Authors and Affiliations

  1. Mechanical Engineering Department, Physics Department, Massachusetts Institute of Technology, Cambridge, MA, USA

    Fangzhou Xia

  2. Production and Precision Metrology, Ilmenau University of Technology, Ilmenau, Germany

    Ivo W. Rangelow

  3. Mechanical Engineering Department, Massachusetts Institute of Technology, Cambridge, MA, USA

    Kamal Youcef-Toumi

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  1. Fangzhou Xia
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  2. Ivo W. Rangelow
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  3. Kamal Youcef-Toumi
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Xia, F., Rangelow, I.W., Youcef-Toumi, K. (2024). Nanoscale Actuation and Active AFM Probe Design Examples. In: Active Probe Atomic Force Microscopy. Springer, Cham. https://doi.org/10.1007/978-3-031-44233-9_4

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