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AFM Nano-Positioning System Design

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Active Probe Atomic Force Microscopy

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Abstract

The nano-positioning system is a crucial component in the AFM that enables its imaging functionality, along with the cantilever probe. This chapter provides a detailed presentation of nano-positioning system designs, starting with an overview of generic nano-positioners, flexures, fixtures, and actuators. In AFM imaging, coarse positioners with a millimeter range and fine scanners with hundreds of micrometer range and sub-nanometer resolution work together to control the relative position between the cantilever probe tip and the sample. Given the specialized positioning requirements of AFM, the discussion then expands to cover the design, modeling, and performance characterization of AFM nano-positioners. Finally, examples of high-bandwidth scanners for high-speed AFM imaging are introduced based on research results.

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Authors and Affiliations

  1. Mechanical Engineering Department, Physics Department, Massachusetts Institute of Technology, Cambridge, MA, USA

    Fangzhou Xia

  2. Production and Precision Metrology, Ilmenau University of Technology, Ilmenau, Germany

    Ivo W. Rangelow

  3. Mechanical Engineering Department, Massachusetts Institute of Technology, Cambridge, MA, USA

    Kamal Youcef-Toumi

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  1. Fangzhou Xia
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  2. Ivo W. Rangelow
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  3. Kamal Youcef-Toumi
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Xia, F., Rangelow, I.W., Youcef-Toumi, K. (2024). AFM Nano-Positioning System Design. In: Active Probe Atomic Force Microscopy. Springer, Cham. https://doi.org/10.1007/978-3-031-44233-9_7

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