1. Orthogonal micro-fluxgate with S-shape excitation wire and 3D solenoid detection coil

   • Bo Guo
   • Shibin Liu
   • Xiaoyan Sun

   Technical Paper 20 September 2014 Pages: 1579 - 1586

   

2. Three-dimensional simulation of surface topography evolution in the Bosch process by a level set method

   • Xiao-Qian Li
   • Zai-Fa Zhou
   • Qing-An Huang

   Technical Paper 27 September 2014 Pages: 1587 - 1593

   

3. Aspects of cavity filling with nano imprint

   • Hella-C. Scheer
   • M. Papenheim
   • C. Steinberg

   Technical Paper 31 December 2014 Pages: 1595 - 1605

   

4. Design and optimization of cantilever based piezoelectric micro power generator for cardiac pacemaker

   • Mohd H. S. Alrashdan
   • Azrul Azlan Hamzah
   • BurhanuddinYeop Majlis

   Technical Paper 07 October 2014 Pages: 1607 - 1617

   

5. Manufacturing of high aspect-ratio 3-dimensional PolyFerroCNT nanocomposite polymer electrodes

   • Sam Kassegne
   • Beejal Mehta
   • Ajit Khosla

   Technical Paper 08 July 2014 Pages: 1619 - 1625

   

6. Room temperature Si–Ti thermopile THz sensor

   • Sofiane Ben Mbarek
   • Sébastien Euphrasie
   • Laurent Chusseau

   Technical Paper 24 July 2014 Pages: 1627 - 1631

   

7. Void-free BCB adhesive wafer bonding with high alignment accuracy

   • Zhen Song
   • Zhimin Tan
   • Zheyao Wang

   Technical Paper 25 June 2014 Pages: 1633 - 1641

   

8. Nano–bio interface: the characterization of functional bio interface on silicon nanowire

   • A. Wesam Al-Mufti
   • U. Hashim
   • Tijjani Adam

   Technical Paper 20 July 2014 Pages: 1643 - 1649

   

9. The fabrication of back etching 3C-SiC-on-Si diaphragm employing KOH + IPA in MEMS capacitive pressure sensor

   • Noraini Marsi
   • Burhanuddin Yeop Majlis
   • Azrul Azlan Hamzah

   Technical Paper 05 August 2014 Pages: 1651 - 1661

   

10. Bidirectional and location-dependent frequency tuning of single crystal 4H-SiC micromechanical cantilevers

    • Feng Zhao
    • Zhibang Chen

    Technical Paper 27 June 2014 Pages: 1663 - 1668

    

11. Piezoelectric energy harvester using mechanical frequency up conversion for operation at low-level accelerations and low-frequency vibration

    • Dongjae Han
    • Kwang-Seok Yun

    Technical Paper 25 July 2014 Pages: 1669 - 1676

    

12. Characterisation of demoulding parameters in micro-injection moulding

    • C. A. Griffiths
    • G. Tosello
    • B. Whiteside

    Technical Paper 24 July 2014 Pages: 1677 - 1690

    

13. A planar fractal micro-transformer with air core and hilbert curve

    • Yong Zhu
    • Fahimullah Khan
    • Dzung Viet Dao

    Technical Paper 12 July 2014 Pages: 1691 - 1695

    

14. Design of a monolithic integrated three-dimensional MEMS bionic vector hydrophone

    • Guo Jun Zhang
    • Lin Xian Liu
    • Chen Yang Xue

    Technical Paper 30 July 2014 Pages: 1697 - 1708

    

15. Analytical expressions for the electrostatically actuated curled beam problem

    • Mohammad I. Younis

    Technical Paper 24 July 2014 Pages: 1709 - 1717

    

16. Fabrication challenges and test structures for high-aspect-ratio SOI MEMS devices with refilled electrical isolation trenches

    • Jin Xie

    Technical Paper 11 December 2014 Pages: 1719 - 1727

    

17. Numerical and experimental study of the filling stage of roll-to-roll UV embossing process with micro features

    • X. Song
    • X. C. Shan
    • W. S. Teo

    Technical Paper 08 August 2014 Pages: 1729 - 1738

    

18. Modeling in vitro neural electrode interface in neural cell culture medium

    • Tao Sun
    • Wei Mong Tsang
    • Srinivas Merugu

    Technical Paper 09 August 2014 Pages: 1739 - 1747

    

19. A high-performance scanning grating based on tilted (111) silicon wafer for near infrared micro spectrometer application

    • Qiuyu Nie
    • Zhiyu Wen
    • Jian Huang

    Technical Paper 02 November 2014 Pages: 1749 - 1755

    

20. Design and driving characteristic researches of a novel bionic stepping piezoelectric actuator with large load capacity based on clamping blocks

    • Shupeng Wang
    • Zhihui Zhang
    • Bing Zhu

    Technical Paper 08 August 2014 Pages: 1757 - 1765

    

21. Nonlocal thermoelastic nanobeam subjected to a sinusoidal pulse heating and temperature-dependent physical properties

    • Ashraf M. Zenkour
    • Ahmed E. Abouelregal

    Technical Paper 19 August 2014 Pages: 1767 - 1776

    

22. Evaluation of electromigration resistance of lead-free solders using unpassivated stripe-shaped samples

    • M. Aoyama
    • M. Saka

    Technical Paper 05 August 2014 Pages: 1777 - 1785

    

23. Locally resolved stress and strain analysis of sinter-joined micro valves using synchrotron X-ray diffraction and conical slit apertures

    • J. Maisenbacher
    • J. Gibmeier
    • P. Staron

    Technical Paper 03 August 2014 Pages: 1787 - 1795

    

24. A microfluidic device for generation of chemical gradients

    • Yanyan Ge
    • Qiu An
    • Deyu Li

    Technical Paper 30 July 2014 Pages: 1797 - 1804

    

25. Design of a novel RF MEMS square resonator

    • Q. P. Wang
    • J. F. Bao
    • X. Y. Li

    Technical Paper 30 July 2014 Pages: 1805 - 1810