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Locally resolved stress and strain analysis of sinter-joined micro valves using synchrotron X-ray diffraction and conical slit apertures

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Abstract

For assessing the quality of the joining area as well as researching the influence of joining parameters in combination with different materials, the principal stress components of sinter-joined micro valves were analysed. Transmission experiments have been conducted at the high-energy material science (HEMS) beamline P07 at PETRA III, DESY. Due to the dimensions of the samples, a high spatial resolution of the measurements was required. Of special interest was the distribution of residual stress in the joining area of the valves, which demanded a depth resolved measurement using a conical slit. Strains were deduced from the obtained Debye–Scherrer rings of the {200}, {211}, and {220}-planes of the α/α′-phase involving reference measurements on non-sintered powder of the specimen materials. The grain statistics have been improved by integrating over slices of the diffraction rings and by calculating a mean lattice parameter taking into account all lattice planes. From the strain data, the hydrostatic and the deviatoric stress were calculated for the three dimensional stress state.

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Acknowledgments

The authors would like to thank the German Research Foundation (DFG) for the financial support of the collaborate research centre 499 (SFB499).

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Authors and Affiliations

  1. Institute of Applied Materials (IAM), Karlsruhe Institute for Technology, Kaiserstrasse 12, 76131, Karlsruhe, Germany

    J. Maisenbacher & J. Gibmeier

  2. Institute of Production Science (wbk), Karlsruhe Institute for Technology, Kaiserstrasse 12, 76131, Karlsruhe, Germany

    K. Klimscha

  3. Institute of Materials Science, Helmholtz-Zentrum Geesthacht (HZG), Max-Planck-Strasse 1, 21502, Geesthacht, Germany

    T. Fischer & P. Staron

Authors
  1. J. Maisenbacher
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  2. J. Gibmeier
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  3. K. Klimscha
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  4. T. Fischer
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  5. P. Staron
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Correspondence to J. Maisenbacher.

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Maisenbacher, J., Gibmeier, J., Klimscha, K. et al. Locally resolved stress and strain analysis of sinter-joined micro valves using synchrotron X-ray diffraction and conical slit apertures. Microsyst Technol 21, 1787–1795 (2015). https://doi.org/10.1007/s00542-014-2285-6

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