1. Design, test, integration and packaging of MEMS/MOEMS, 2006

   • B. Michel
   • B. Courtois

   Editorial 16 January 2007 Pages: 1449 - 1449

2. A new generic surface micromachining module for MEMS hermetic packaging at temperatures below 200 °C

   • R. Hellín Rico
   • J.-P. Celis
   • A. Witvrouw

   Technical Paper 04 January 2007 Pages: 1451 - 1456

   

3. A novel packaging approach for RF MEMS switching functions on alumina substrate

   • Mohamad El Khatib
   • Arnaud Pothier
   • Pierre Blondy

   Technical Paper 12 January 2007 Pages: 1457 - 1461

   

4. Au–Sn flip-chip solder bump for microelectronic and optoelectronic applications

   • Jeong-Won Yoon
   • Hyun-Suk Chun
   • Seung-Boo Jung

   Technical Paper 14 December 2006 Pages: 1463 - 1469

   

5. Ultra fine pitch flat panel display packaging using 3 μm conductive particles

   • G. J. Wang
   • Y. C. Lin
   • G. S. Lin

   Technical Paper 26 January 2007 Pages: 1471 - 1475

   

6. A novel contact resistance model of anisotropic conductive film for FPD packaging

   • G. J. Wang
   • Y. C. Lin
   • G. S. Lin

   Technical Paper 15 November 2006 Pages: 1477 - 1482

   

7. High quality factor copper inductors integrated in deep dry-etched quartz substrates

   • C. Leroy
   • M. B. Pisani
   • A. M. Ionescu

   Technical Paper 24 January 2007 Pages: 1483 - 1487

   

8. Fabrication of silicon-on-insulator MEM resonators with deep sub-micron transduction gaps

   • Nicoleta Diana Badila Ciressan
   • Cyrille Hibert
   • Adrian M. Ionescu

   Technical Paper 01 February 2007 Pages: 1489 - 1493

   

9. Design of bossed silicon membranes for high sensitivity microphone applications

   • P. Martins
   • S. Beclin
   • C. Malhaire

   Technical Paper 04 January 2007 Pages: 1495 - 1500

   

10. Studies on a micro turbine device with both journal- and thrust-air bearings

    • X. C. Shan
    • Q. D. Zhang
    • R. Maeda

    Technical Paper 04 January 2007 Pages: 1501 - 1508

    

11. Development of a multi-layer microelectrofluidic platform

    • S. H. Ng
    • Z. F. Wang
    • N. F. de Rooij

    Technical Paper 04 January 2007 Pages: 1509 - 1515

    

12. Quality factor of micro cantilevers transduced by piezoelectric lead zirconate titanate film

    • Jian Lu
    • Tsuyoshi Ikehara
    • Takashi Mihara

    Technical Paper 04 November 2006 Pages: 1517 - 1522

    

13. The design and fabrication of polymerase chain reaction platform

    • Chao-Heng Chien
    • Hui-Min Yu

    Technical Paper 01 December 2006 Pages: 1523 - 1527

    

14. Design and fabrication of the concentric circle light guiding plate for LED-backlight module by MEMS technique

    • Chao-Heng Chien
    • Zhi-Peng Chen

    Technical Paper 04 January 2007 Pages: 1529 - 1535

    

15. Concave microlens array mold fabrication in photoresist using UV proximity printing

    • Tsung-Hung Lin
    • Hsiharng Yang
    • Ching-Kong Chao

    Technical Paper 18 October 2006 Pages: 1537 - 1543

    

16. Yield analysis via induction of process statistics into the design of MEMS and other microsystems

    • Shyam Praveen Vudathu
    • Kishore Kumar Duganapalli
    • Angelika Bunse-Gerstner

    Technical Paper 19 October 2006 Pages: 1545 - 1551

    

17. High current densities in copper microcoils: influence of substrate on failure mode

    • Johan Moulin
    • Marion Woytasik
    • Alain Bosseboeuf

    Technical Paper 28 March 2007 Pages: 1553 - 1558

    

18. Design and development of sub-micron scale specimens with electroplated structures for the microtensile testing of thin films

    • Ming-Tzer Lin
    • Chi-Jia Tong
    • Chung-Hsun Chiang

    Technical Paper 04 January 2007 Pages: 1559 - 1565

    

19. Effect of surface finish of substrate on mechanical reliability of In-48Sn solder joints in MOEMS package

    • Ja-Myeong Koo
    • Seung-Boo Jung

    Technical Paper 04 January 2007 Pages: 1567 - 1573

    

20. Characterization of flexible RF microcoils dedicated to local MRI

    • M. Woytasik
    • J.-C. Ginefri
    • L. Darrasse

    Technical Paper 10 November 2006 Pages: 1575 - 1580

    

21. High viscous liquids as a source in micro-screw heat exchanger: fabrication, simulation and experiments

    • Haifa El-Sadi
    • Nabil Esmail
    • Andreas K. Athienitis

    Technical Paper 04 January 2007 Pages: 1581 - 1587

    

22. MEMS tunable capacitors with fragmented electrodes and rotational electro-thermal drive

    • A. Mehdaoui
    • M. B. Pisani
    • A. M. Ionescu

    Technical Paper 05 January 2007 Pages: 1589 - 1594

    

23. A new scanning MEMS mirror

    • Z. F. Wang
    • W. Noell
    • S. P. Lim

    Technical Paper 04 January 2007 Pages: 1595 - 1599

    

24. Micro-ball lens array fabrication in photoresist using PTFE hydrophobic effect

    • Ruey Fang Shyu
    • Hsiharng Yang
    • Jhy-Cherng Tsai

    Technical Paper 24 October 2006 Pages: 1601 - 1606

    

25. Integration of micro-electro-mechanical deformable mirrors in doped fiber amplifiers

    • D. Bouyge
    • A. Crunteanu
    • A. Barthélemy

    Technical Paper 04 January 2007 Pages: 1607 - 1613

    

26. Design and modeling of electromagnetic actuator in mems-based valveless impedance pump

    • Hsien-Tsung Chang
    • Chia-Yen Lee
    • Chih-Yung Wen

    Technical Paper 14 December 2006 Pages: 1615 - 1622

    

27. Miniaturized fluorescence excitation platform with optical fiber for bio-detection chips

    • Hsiharng Yang
    • Chung-Tze Lee
    • Fuh-Yu Chang

    Technical Paper 04 November 2006 Pages: 1623 - 1628

    

28. Power processing circuits for electromagnetic, electrostatic and piezoelectric inertial energy scavengers

    • P. D. Mitcheson
    • T. C. Green
    • E. M. Yeatman

    Technical Paper 04 January 2007 Pages: 1629 - 1635

    

29. Scaling effects for electromagnetic vibrational power generators

    • Terence O’Donnell
    • Chitta Saha
    • John Tudor

    Technical Paper 04 January 2007 Pages: 1637 - 1645

    

30. Experimental comparison of macro and micro scale electromagnetic vibration powered generators

    • S. P. Beeby
    • M. J. Tudor
    • S. Roy

    Technical Paper 16 January 2007 Pages: 1647 - 1653

    

31. Vibrational energy scavenging with Si technology electromagnetic inertial microgenerators

    • Christophe Serre
    • Alejandro Pérez-Rodríguez
    • Jaume Esteve

    Technical Paper 13 February 2007 Pages: 1655 - 1661

    

32. MEMS design and fabrication of an electrostatic vibration-to-electricity energy converter

    • Yi Chiu
    • Chiung-Ting Kuo
    • Yu-Shan Chu

    Technical Paper 04 January 2007 Pages: 1663 - 1669

    

33. Recent developments in MEMS-based miniature fuel cells

    • Tristan Pichonat
    • Bernard Gauthier-Manuel

    Technical Paper 04 January 2007 Pages: 1671 - 1678