Abstract
This paper presents a new research study on the fabrication of a fluorescence bio-detection chip with an optical fiber transmission platform. Anisotropic wet etching on (100) silicon wafers to fabrication V-groove for optical fiber alignment and micro-mirror were included. Combined with anodic bonding technique to adhere glass, silicon structure and optical fiber for a fluorescence excitation platform was completed. In this study, a 40% KOH etching solution was used to study the parameter effect. The results show that the working temperature is the main parameter that significantly effects the etch rate. The anisotropic etching resulted in 54.7° reflective mirrors and the reflectivity for the optical beam was also examined. The surface roughness of the micro-mirror is Ra 4.1 nm measured using AFM providing excellent optical reflection. The incident light and beam profiles were also examined for further study. This study shows that this micro-platform is adaptable for fluorescence bio-detection.
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Acknowledgment
This work was supported by the National Science Council (series no. NSC94-2212-E-005-016) of Taiwan, R.O.C.
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Yang, H., Lee, CT. & Chang, FY. Miniaturized fluorescence excitation platform with optical fiber for bio-detection chips. Microsyst Technol 13, 1623–1628 (2007). https://doi.org/10.1007/s00542-006-0271-3
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DOI: https://doi.org/10.1007/s00542-006-0271-3