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Yield analysis via induction of process statistics into the design of MEMS and other microsystems

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Abstract

This paper presents an emerging theory on the effects of unavoidable process variations during the fabrication of MEMS and other microsystems. The effects of parametric variations on device performance and design yield of the microsystems devices are analyzed and presented. A novel methodology in the design cycle of MEMS and other microsystems is introduced. The methodology is based on the concept of worst-case analysis having colossal advantages to offer. This paper describes some steps of this methodology with elaborated results. Also described in this paper is how each step contributes to counteract the effects produced by the parametric variations in the product cycle of microsystems.

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Acknowledgments

This work is sponsored by the European Union funded “Patent-Design for Micro & Nano Manufacture” (PATENT-DfMM) project.

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Authors and Affiliations

  1. Institute for Electromagnetic Theory and Microelectronics (ITEM), University of Bremen, P.O. Box 330440, 28334, Bremen, Germany

    Shyam Praveen Vudathu, Kishore Kumar Duganapalli & Rainer Laur

  2. Center of Industrial Mathematics (ZeTeM), University of Bremen, P.O. Box 330440, 28334, Bremen, Germany

    Dorota Kubalińska & Angelika Bunse-Gerstner

Authors
  1. Shyam Praveen Vudathu
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  2. Kishore Kumar Duganapalli
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  3. Rainer Laur
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  4. Dorota Kubalińska
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  5. Angelika Bunse-Gerstner
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Correspondence to Shyam Praveen Vudathu.

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Vudathu, S.P., Duganapalli, K.K., Laur, R. et al. Yield analysis via induction of process statistics into the design of MEMS and other microsystems. Microsyst Technol 13, 1545–1551 (2007). https://doi.org/10.1007/s00542-006-0263-3

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  • DOI: https://doi.org/10.1007/s00542-006-0263-3

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