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Micro-ball lens array fabrication in photoresist using PTFE hydrophobic effect

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Abstract

This paper presents a simple method for fabricating a micro-ball lens and its array. The core technology involves the hydrophobic characteristics of polyterafluoroethylene (PTFE) substrate. High contact angle between the melted photoresist pattern and PTFE generates the micro-ball lens and array. The PTFE thin film is spun onto a silicon wafer and oven dried. Photoresist AZ4620 is used to pattern micro-columns with various diameters; 60, 70 and 80 μm. A thermal reflow process is then applied to melt these micro-column patterns into a micro-ball lens array. The achieved micro-ball lens array has a diameter of 98 μm fabricated using 80 μm diameter patterns. This method provides a simple fabrication process and low material cost.

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Acknowledgment

This work was supported by the National Science Council (series no. NSC 94-2212-E-150-016) of Taiwan, R.O.C.

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Authors and Affiliations

  1. Department of Mechanical Manufacturing Engineering, National Formosa University, 632, Yunlin, Taiwan

    Ruey Fang Shyu

  2. Institute of Precision Engineering, National Chung Hsing University, 402, Taichung, Taiwan

    Hsiharng Yang & Wen-Ren Tsai

  3. Center of Nanoscience and Nanotechnology, National Chung Hsing University, 402, Taichung, Taiwan

    Hsiharng Yang

  4. Department of Mechanical Engineering, National Chung Hsing University, 402, Taichung, Taiwan

    Jhy-Cherng Tsai

Authors
  1. Ruey Fang Shyu
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  2. Hsiharng Yang
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  3. Wen-Ren Tsai
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  4. Jhy-Cherng Tsai
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Correspondence to Hsiharng Yang.

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Shyu, R.F., Yang, H., Tsai, WR. et al. Micro-ball lens array fabrication in photoresist using PTFE hydrophobic effect. Microsyst Technol 13, 1601–1606 (2007). https://doi.org/10.1007/s00542-006-0265-1

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  • DOI: https://doi.org/10.1007/s00542-006-0265-1

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