Volume 20, Issue 4-5 | Microsystem Technologies

Microsystem Technologies

Micro- and Nanosystems Information Storage and Processing Systems

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Volume 20, Issue 4-5

April 2014

Special Issue of the Conference ‘SMART SENSORS, ACTUATORS AND MEMS’, within the SPIE EUROPE Symposium ‘MICROTECHNOLOGIES’ Grenoble, France, 24 - 26 April 2013

Issue Editors:

Ulrich Schmid,
Thomas Becker,
Bernd Michel

52 articles in this issue

Special issue of the conference ‘Smart Sensors, Actuators and MEMS’, within the SPIE EUROPE Symposium ‘MICROTECHNOLOGIES’ Grenoble, France, 24–26 April 2013
Ulrich Schmid
Thomas Becker
Bernd Michel
Editorial 21 February 2014 Pages: 521 - 521
High temperature stability of electrically conductive Pt–Rh/ZrO₂ and Pt–Rh/HfO₂ nanocomposite thin film electrodes
Scott C. Moulzolf
David J. Frankel
Robert J. Lad
Technical Paper 21 November 2013 Pages: 523 - 531
Design and characterization of a multi-stable magnetic shape memory alloy hybrid actuator
Y. Le Gall
C. Bolzmacher
Technical Paper 03 December 2013 Pages: 533 - 543
Pre-bond megasonic cleaning with improved process control
D. Dussault
E. Liebscher
V. Dragoi
Technical Paper 24 November 2013 Pages: 545 - 550
Thermal actuators featuring large displacements for passive temperature sensing
H. Steiner
W. Hortschitz
T. Sauter
Technical Paper 29 November 2013 Pages: 551 - 557
A phase-locked loop frequency tracking system for portable microelectromechanical piezoresistive cantilever mass sensors
Hutomo Suryo Wasisto
Qing Zhang
Erwin Peiner
Technical Paper 01 December 2013 Pages: 559 - 569
Finite element modeling and experimental proof of NEMS-based silicon pillar resonators for nanoparticle mass sensing applications
Hutomo Suryo Wasisto
Kai Huang
Erwin Peiner
Technical Paper 03 December 2013 Pages: 571 - 584
Development and characterization of a microthermoelectric generator with plated copper/constantan thermocouples
Silvia Pelegrini
Andrea Adami
Leandro Lorenzelli
Technical Paper 30 November 2013 Pages: 585 - 592
Micro molding for double-sided micro structuring of SU-8 resist
A. Oerke
S. Büttgenbach
A. Dietzel
Technical Paper 29 November 2013 Pages: 593 - 598
On a high-potential variable-stiffness device
Markus Henke
Gerald Gerlach
Technical Paper 11 December 2013 Pages: 599 - 606
Alterations in the complex refractive index of copper oxide thin films as sensing effect for hydrogen sulfide monitoring
Janosch Kneer
Manuel Boxberg
Jürgen Wöllenstein
Technical Paper 29 November 2013 Pages: 607 - 613
Lock-in amplifier powered analogue Q-control circuit for self-actuated self-sensing piezoelectric MEMS resonators
M. Kucera
F. Hofbauer
U. Schmid
Technical Paper 30 November 2013 Pages: 615 - 625
Multi-modal vibration based MEMS energy harvesters for ultra-low power wireless functional nodes
J. Iannacci
E. Serra
P. M. Sarro
Technical Paper 04 December 2013 Pages: 627 - 640
Microthermal sensors for determining fluid composition and flow rate in fluidic systems
B. Schmitt
C. Kiefer
A. Schütze
Technical Paper 04 December 2013 Pages: 641 - 652
Wafer bonding using Cu–Sn intermetallic bonding layers
C. Flötgen
M. Pawlak
V. Dragoi
Technical Paper 08 December 2013 Pages: 653 - 662
Electrical characterization of micromachined AlN resonators at various back pressures
Abdallah Ababneh
A. N. Al-Omari
H. Seidel
Technical Paper 11 December 2013 Pages: 663 - 670
Evaluation of low-acceleration MEMS piezoelectric energy harvesting devices
Nathan Jackson
Rosemary O’Keeffe
Alan Mathewson
Technical Paper 05 December 2013 Pages: 671 - 680
Microgalvanic nickel pulse plating process for the fabrication of thermal microactuators
Wolfgang E. G. Hansal
Harald Steiner
P. Svasek
Technical Paper 08 December 2013 Pages: 681 - 689
Piezoelectric in-plane microplate resonators based on contour and flexure-actuated modes
Tomás Manzaneque
V. Ruiz-Díez
J. L. Sánchez-Rojas
Technical Paper 10 December 2013 Pages: 691 - 699
Energy storage options for wireless sensors powered by aircraft specific thermoelectric energy harvester
K. Thangaraj
A. Elefsiniots
R. Pullin
Technical Paper 11 December 2013 Pages: 701 - 707
2–2 composites based on [011]-poled relaxor-ferroelectric single crystals: analysis of the piezoelectric anisotropy and squared figures of merit for energy harvesting applications
C. R. Bowen
D. N. Betts
V. Yu. Topolov
Technical Paper 07 December 2013 Pages: 709 - 717
Optimization of ceramics bonding in the area of pressure sensor manufacturing
Radovan Novotný
Radek Vlach
Radek Kuchta
Technical Paper 10 December 2013 Pages: 719 - 728
A biomimetic approach to machine olfaction, featuring a very large-scale chemical sensor array and embedded neuro-bio-inspired computation
S. Marco
A. Gutiérrez-Gálvez
K. Persaud
Technical Paper 21 December 2013 Pages: 729 - 742
Compact optical position feedback scheme for MOEMS mirrors
Andreas Tortschanoff
M. Baumgart
A. Kenda
Technical Paper 08 December 2013 Pages: 743 - 749
Temperature dependant dielectric breakdown of sputter-deposited AlN thin films using a time-zero approach
Michael Schneider
Achim Bittner
Ulrich Schmid
Technical Paper 13 December 2013 Pages: 751 - 757
Production of vertical nanowire resonators by cryogenic-ICP–DRIE
S. Merzsch
F. Steib
A. Waag
Technical Paper 18 December 2013 Pages: 759 - 767
High-resolution low-cost optoelectronic instrument for supervising grape must fermentation
F. Jiménez-Márquez
J. Vázquez
J. L. Sánchez-Rojas
Technical Paper 15 December 2013 Pages: 769 - 782
Principles of nonlinear MEMS-resonators regarding magnetic-field detection and the interaction with a capacitive read-out system
Michael Stifter
Franz Keplinger
Thilo Sauter
Technical Paper 15 December 2013 Pages: 783 - 791
Magnetic tunnel junction sensors with pTesla sensitivity
S. Cardoso
D. C. Leitao
P. P. Freitas
Technical Paper 21 January 2014 Pages: 793 - 802
Influence of interfacial adhesion on the mechanical response of magneto-rheological elastomers at high strain
T. Pössinger
C. Bolzmacher
N. Triantafyllidis
Technical Paper 19 December 2013 Pages: 803 - 814
Integration of polystyrene microlenses with both convex and concave profiles in a polymer-based microfluidic system
Yiqiang Fan
Huawei Li
Ian G. Foulds
Technical Paper 20 December 2013 Pages: 815 - 819
Flexible hot-film anemometer arrays on curved structures for active flow control on airplane wings
M. Schwerter
T. Beutel
A. Dietzel
Technical Paper 14 January 2014 Pages: 821 - 829
Model-based design and test of vibration energy harvester for aircraft application
Zdenek Hadas
Vojtech Vetiska
Vladislav Singule
Technical Paper 09 January 2014 Pages: 831 - 843
Principal tests and verification of a resonance-based solar harvester utilizing micro/nano technology
P. Fiala
P. Drexler
D. Nespor
Technical Paper 09 January 2014 Pages: 845 - 860
Temperature characterization of flip-chip packaged piezoresistive barometric pressure sensors
T. Waber
W. Pahl
A. Leidl
Technical Paper 10 January 2014 Pages: 861 - 867
Design of an electro-thermally actuated cell microgripper
Sonia Iamoni
Aurelio Somà
Technical Paper 04 January 2014 Pages: 869 - 877
Rotational micro actuator for microsurgery
M. Leester-Schädel
J.-W. Thies
A. Dietzel
Technical Paper 28 January 2014 Pages: 879 - 888
Wafer-level reliability characterization for wafer-level-packaged microbolometer with ultrasmall array size
Chung Mo Yang
Ho Jung
Hee Yeoun Kim
Technical Paper 05 February 2014 Pages: 889 - 897
Design and characteristics of a-Si-based micro-bolometers with shared-anchor structure in vacuum packaged systems
Ho Jung
Tae Hyun Kim
Hee Yeoun Kim
Technical Paper 28 January 2014 Pages: 899 - 905
Design of silicon micro-resonators with low mechanical and optical losses for quantum optics experiments
A. Borrielli
M. Bonaldi
T. Zoumpoulidis
Technical Paper 29 January 2014 Pages: 907 - 917
Evaluation of bioinspired functional surfaces for nanoparticle filtering
Sebastian Busch
Manuel Ketterer
Jürgen Wöllenstein
Technical Paper 02 February 2014 Pages: 919 - 925
Silicon cantilevers with piezo-resistive measuring bridge for tactile line measurement
Thomas Frank
L. Doering
S. Reich
Technical Paper 01 February 2014 Pages: 927 - 931
Unimorph and bimorph piezoelectric energy harvester stimulated by β-emitting radioisotopes: a modeling study
Ali B. Alamin Dow
Ulrich Schmid
Nazir P. Kherani
Technical Paper 31 January 2014 Pages: 933 - 944
Application of quartz tuning forks and extensional microresonators for viscosity and density measurements in oil/fuel mixtures
J. Toledo
T. Manzaneque
J. L. Sánchez-Rojas
Technical Paper 06 February 2014 Pages: 945 - 953
Single mask fabrication process for movable MEMS devices
Ali B. Alamin Dow
Adel Gougam
I. W. Rangelow
Technical Paper 09 February 2014 Pages: 955 - 961
Estimation of squeeze film damping in artificial hair-sensor towards the detection-limit of crickets’ hairs
A. M. K. Dagamseh
Technical Paper 09 February 2014 Pages: 963 - 970
Component design and testing for a miniaturised autonomous sensor based on a nanowire materials platform
Giorgos Fagas
Michael Nolan
Cees van Rijn
Technical Paper 20 February 2014 Pages: 971 - 988
Development of a novel piezoresistive thin film sensor system based on hydrogenated carbon
Saskia Biehl
Christian Rumposch
Martin Luig
Technical Paper 22 February 2014 Pages: 989 - 993
Multi field modeling of a microelectromechanical speaker system with electrostatic driving principle
David Tumpold
Manfred Kaltenbacher
Alfons Dehé
Technical Paper 11 February 2014 Pages: 995 - 1006
Towards a complementary balanced energy harvesting solution for low power embedded systems
Yannick Verbelen
An Braeken
Abdellah Touhafi
Technical Paper Open access 19 February 2014 Pages: 1007 - 1021