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Microsystem Technologies

, Volume 20, Issue 4–5, pp 919–925 | Cite as

Evaluation of bioinspired functional surfaces for nanoparticle filtering

  • Sebastian BuschEmail author
  • Manuel Ketterer
  • Xenia Vinzenz
  • Christian Hoffmann
  • Katrin Schmitt
  • Jürgen Wöllenstein
Technical Paper
  • 208 Downloads

Abstract

We present the development of a novel integrated device for airborne nanoparticle filtering with bioinspired nanoscale functionality. The underlying idea is to investigate the principle of adherent surfaces, e.g. pollen, as a biological model and transfer this functionality into a technology using functionalized microstructured surfaces. This might offer an efficient filtering method for nanoscale airborne particles without the limitations in gas permeability of conventional filters. We investigated the different pollen species for their structural and biochemical surface properties to achieve bioinspired surface functionality on silicon surfaces. The resulting conical structures have sizes from 4 to 20 μm. Depending on structure sizes, the adhesive properties of the surfaces towards aerosol particles could be directly influenced. The surfaces were tested in a demonstrator setup and the collection efficiency visually determined.

Keywords

Pollen Surface Collection Efficiency Filter Element Pollen Species Functional Coating 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

Notes

Acknowledgments

We gratefully acknowledge financial support from the German Research Foundation under grant number WO 1698/1-1. We thank Marie-Luise Bauersfeld and Carolin Peter, Fraunhofer IPM, for their assistance with photolithography and dry etching.

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Copyright information

© Springer-Verlag Berlin Heidelberg 2014

Authors and Affiliations

  • Sebastian Busch
    • 1
    Email author
  • Manuel Ketterer
    • 1
  • Xenia Vinzenz
    • 2
  • Christian Hoffmann
    • 2
  • Katrin Schmitt
    • 3
  • Jürgen Wöllenstein
    • 1
    • 3
  1. 1.Department of Microsystems Engineering IMTEKUniversity of FreiburgFreiburgGermany
  2. 2.Institute for Bioprocessing and Analytical Measurement TechniquesHeilbad HeiligenstadtGermany
  3. 3.Fraunhofer Institute for Physical Measurement TechniquesFreiburgGermany

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