Abstract
The current work reports on the realization of movable micromachining devices using self-aligned single-mask fabrication process. Only dry etching process utilizing inductively coupled plasma reactive ion etching was used to release 3D micro structures from single crystal silicon substrate. No wet etching process is required to release the structures as is the case with silicon on insulator (SOI) wafers. Also the developed process does not require an SOI substrate and accordingly dispensing with the application of a wet etching step, thus yielding uniform structures without stiction. The optimized process was applied to realize thermally actuated microgrippers. The article presents the development of the fabrication process and demonstrates the operation of the fabricated device. The optimized process provides an avenue for low cost fabrication of movable micromachining devices without the use of complicated wet etching steps typically associated with SOI substrates.
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Acknowledgments
This work was supported by the Institute of Micro and Nanoelectronic System, Technical University of Ilmenau. Support of the ORF-RE (Ontario Research Fund—Research Excellence) Program and NSERC (Natural Sciences and Engineering Research Council Canada) Discovery grant is herewith acknowledged.
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Alamin Dow, A.B., Gougam, A., Kherani, N.P. et al. Single mask fabrication process for movable MEMS devices. Microsyst Technol 20, 955–961 (2014). https://doi.org/10.1007/s00542-014-2098-7
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DOI: https://doi.org/10.1007/s00542-014-2098-7