Abstract
A set of flexible MEMS sensor arrays for flow measurements in boundary layers is presented. The sensor principle of these anemometers is based on convective heat transfer from a hot-film into the fluid. Each sensor consists of a nickel sensing element between copper supply tracks. The functional layers are attached either on a ready-made polyimide foil or on a spin-on polyimide layer. These variants are designed to meet the requirements of measurements in different environments. Spin-on technology enables the use of very thin polyimide layers, ideally suited for measurements in transient flows. It is a unique characteristic of the presented arrays that their total thickness can be scaled from 7 to 52 μm. This is essential, because the sensor thickness has to be adapted to the varying thickness of the boundary layers in different aerodynamic tests. With these sensors we meet the special requirements of a wide range of fluid mechanic experiments but in particular those of future active flow control on airplane wings. For less critical flow conditions with much thicker boundary layers, thicker sensors might be sufficient and cheaper, so that sensors fabricated on ready-made foils are perfect for these applications. Since the presented sensors are flexible, they can be attached on curved aerodynamic structures without any geometric mismatches. The entire development, starting from theoretical investigations, is described. Further, the micro-fabrication is discussed, including photolithography, sputtering and wet-etching. In particular the wet-etching of the sensing element is found to be critical for the functional characteristics.
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Acknowledgments
The authors would like to thank all the project partners for the cooperative and effective work in the framework of the collaborative research center 880. One of the authors (S. B.) gratefully acknowledges the financial support of the Volkswagen Foundation. T. B. also thanks the colleagues at CMST from Ghent University and IMEC Ghent for the nice integration into their group and their cooperation.
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Schwerter, M., Beutel, T., Leester-Schädel, M. et al. Flexible hot-film anemometer arrays on curved structures for active flow control on airplane wings. Microsyst Technol 20, 821–829 (2014). https://doi.org/10.1007/s00542-013-2054-y
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DOI: https://doi.org/10.1007/s00542-013-2054-y