Etching of Gallium Arsenide in a Cl2 + H2 Plasma A. M. EfremovA. V. Antonov OriginalPaper Pages: 1 - 6
Enhanced Generation of Interface States in MIS IC Elements under the Action of UV and X-ray Radiations M. N. LevinE. N. BormontovA. V. Tatarintsev OriginalPaper Pages: 12 - 16
The Effect of Ballistic Conduction Electrons on the Current–Voltage Characteristics of Thin-Film Bismuth-Based Cross-Shaped Microstructures A. I. Il'inL. I. AparshinaB. N. Tolkunov OriginalPaper Pages: 17 - 21
The Formation of Silicon Dioxide Films by TEOS Photochemical Decomposition A. M. SvetlichnyiV. V. PolyakovYu. N. Varzarev OriginalPaper Pages: 22 - 26
Microsystems Engineering: A Great Stride Forward in Microelectronics Technology P. P. Mal'tsev OriginalPaper Pages: 27 - 28
Acoustic Microscopy in Micrometrology V. S. KuznetsovS. A. OgorodnikovA. V. Prokaznikov OriginalPaper Pages: 29 - 34
The Structure of Complex Thin-Film Systems from Ellipsometric Simulation: A PbI2–Cu Photoresist N. V. Sopinskii OriginalPaper Pages: 35 - 39
Anomalous Dependence of Small-Angle IR Scattering on Photoexcitation Power and Surface-Layer Defects in Mechanically Polished Silicon and Germanium Single Crystals V. A. Yur'ev OriginalPaper Pages: 40 - 42
Low-Voltage Complementary Push-Pull Inverters for ULSI: Simulation and Prospects A. N. BubennikovA. V. Zykov OriginalPaper Pages: 43 - 53
A Circuit-Design Model of a Digital Neuron Operating with the Mean Value of a Stochastic Stream A. V. Luk'yanov OriginalPaper Pages: 54 - 58
A High-Speed Pseudorandom Test Pattern Generator I. A. MurashkoV. N. Yarmolik OriginalPaper Pages: 59 - 66