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Acoustic Microscopy in Micrometrology

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Abstract

In-depth analysis of the propagation of an acoustic signal excited by a short radio pulse is performed. The signal is reflected from the simple lens of a scanning acoustic microscope, and its power is detected. An expression for V(z) curve (acoustic signature of a material) is derived. It takes into account excitation conditions (delay and recording times of a signal to be detected) and lens parameters.

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Authors and Affiliations

  1. Demidov State University, ul. Sovetskaya 14, Yaroslavl, 150000, Russia

    V. S. Kuznetsov & S. A. Ogorodnikov

  2. Institute of Microelectronics, Russian Academy of Sciences, ul. Universitetskaya 21, Yaroslavl, 150007, Russia

    M. N. Preobrazhenskii & A. V. Prokaznikov

Authors
  1. V. S. Kuznetsov
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  2. S. A. Ogorodnikov
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  3. M. N. Preobrazhenskii
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  4. A. V. Prokaznikov
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Kuznetsov, V.S., Ogorodnikov, S.A., Preobrazhenskii, M.N. et al. Acoustic Microscopy in Micrometrology. Russian Microelectronics 30, 29–34 (2001). https://doi.org/10.1023/A:1009417724233

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  • DOI: https://doi.org/10.1023/A:1009417724233

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