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Microsystems Engineering: A Great Stride Forward in Microelectronics Technology

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Abstract

The development of new-generation technological and engineering concepts by the example of “microsystems technology” and “microsystems engineering” approaches is considered.

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REFERENCES

  1. Klimov, D.M., Vasil'ev, A.A., Luchinin, V.V., and Mal'tsev, P.P., Microsystems Engineering in the XXI Century, Mikrosist. Tekh., 1999, no. 1, pp. 3-6.

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  2. Bocharov, L.Yu. and Mal'tsev, P.P., Micromechanical Systems: The Current Status and Prospects, Mikrosist. Tekh., 1999, no. 1, pp. 41-46.

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  3. Mal'tsev, P.P., Ponomarev, K.M., and Stepanov, Yu.I., “Smart Dust” Based on Microsystems Engineering, Mikrosist. Tekh., 2000, no. 4, pp. 40-45.

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Authors
  1. P. P. Mal'tsev
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Mal'tsev, P.P. Microsystems Engineering: A Great Stride Forward in Microelectronics Technology. Russian Microelectronics 30, 27–28 (2001). https://doi.org/10.1023/A:1009465607395

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  • DOI: https://doi.org/10.1023/A:1009465607395

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