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Investigation on the development and building of a voice coil actuator-driven XY micro-motion stage with dual-range capabilities

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Abstract

A growing trend in the utilization of compliant micro-motion stages, which offer exceptional precision and repeatability in positioning. These stages enable the creation of dual-range positioning systems, allowing for precise positioning at the nanoscale within a centimeter-scale working area when combined with conventional stages. However, such systems often come with a high price tag and require substantial physical space. This research presents an alternative solution in the form of a compact, cost-effective XY micro-motion stage with dual-range manipulation to address these limitations. The primary objective is to maintain workspace efficiency while improving positioning accuracy. This is achieved by integrating a long-range, low-resolution linear encoder with short-range, high-resolution capacitive sensors. The linear encoder determines the stage's position and provides coarse positioning data, while the capacitive sensors step in to correct any positional errors, enabling precise fine positioning. By adopting this approach, an impressive positioning precision of approximately 1.5 μm is attained within a 3 mm × 3 mm workspace. The compliant stage is constructed using aluminum, and wire electric discharge machining is employed. This material is well-suited for this application due to its high reversible strain and compatibility with compliant systems.

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  1. Department of Mechanical Engineering, Veermata Jijabai Technological Institute, Matunga, Mumbai, Maharashtra, 400019, India

    Prasanna P. Raut, A. S. Rao & Devakant D. Baviskar

  2. Department of International Institute for Aerospace Engineering and Management (IIAEM), Faculty of Engineering and Technology, JAIN (Deemed-to-Be University), Bengaluru, Karnataka, 560069, India

    Shrishail Sollapur

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Raut, P.P., Rao, A.S., Sollapur, S. et al. Investigation on the development and building of a voice coil actuator-driven XY micro-motion stage with dual-range capabilities. Int J Interact Des Manuf (2023). https://doi.org/10.1007/s12008-023-01665-2

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