Nanoelectromechanical diamond structures in quantum informatics. Part II A. V. Tsukanov OriginalPaper 19 May 2016 Pages: 153 - 166
Modeling of the high aspect groove etching in Si in a Cl2/Ar mixture plasma A. S. ShumilovI. I. AmirovV. F. Lukichev OriginalPaper 19 May 2016 Pages: 167 - 179
Mathematical model of thin-film electrode polarization I. A. KuznetsovaA. N. KulikovA. M. Skundin OriginalPaper 19 May 2016 Pages: 180 - 185
Investigation of the impact of plasma etching steps on the roughness of the fin FET channel sidewalls in the scheme of hetero-integration G. V. BaranovA. P. MileninM. P. Baklanov OriginalPaper 19 May 2016 Pages: 186 - 190
Formation of silver and zinc selenide relief patterns by the lift-off photolithography method D. V. LysichS. V. ZelentsovI. N. Antonov OriginalPaper 19 May 2016 Pages: 191 - 195
A nonlinear microwave model of a low-barrier diode based on semiconductor junctions I. V. YunusovV. A. KagadeiV. S. Arykov OriginalPaper 19 May 2016 Pages: 196 - 204
Detection of terahertz radiation by resonant tunneling nanoheterostructures V. I. EgorkinV. V. Kapaev OriginalPaper 19 May 2016 Pages: 205 - 214
Non-stationary phase transitions in systems metallization of silicon structures A. A. SkvortsovS. M. ZuevM. V. Koryachko OriginalPaper 19 May 2016 Pages: 215 - 222
Analysis of the technological characteristics in fabricating SOI MEMS transducers N. M. Parfenov OriginalPaper 19 May 2016 Pages: 223 - 227