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Integral isoconversional method for evaluating crystallization parameters of thin films of Ge2Sb2Te5 phase change memory materials

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Inorganic Materials Aims and scope

Abstract

We propose a method for evaluating kinetic parameters for the crystallization of thin films of phase change materials. Its basic principle is to jointly use model-free and model isoconversional methods in analyzing differential scanning calorimetry results. Using this method, we have identified the reaction model and evaluated the activation energy for crystallization and pre-exponential factor as a function of the degree of conversion for Ge2Sb2Te5-based thin films.

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References

  1. Yang, J.J., Strukov, D.B., and Stewart, D.R., Memristive devices for computing, Nat. Nanotechnol., 2013, vol. 8, pp. 13–24.

    Article  CAS  Google Scholar 

  2. Hu, J.-M., Li, Z., Chen, L.-Q., and Nan, C.-W., Highdensity magnetoresistive random access memory operating at ultralow voltage at room temperature, Nat. Commun., 2011, vol. 2, pp. 1–8.

    Article  CAS  Google Scholar 

  3. Ishiwara, H., Okuyama, M., and Arimoto, Y., Ferroelectric Random Access Memories: Fundamentals and Applications, New York: Springer, 2004.

    Book  Google Scholar 

  4. Burr, G.W., Breitwisch, M.J., Franceschini, M., Garetto, D., Gopalakrishnan, K., Jackson, B., Kurdi, B., Lam, C., Lastras, L.A., Padilla, A., Rajendran, B., Raoux, S., and Shenoy, R.S., Phase change memory technology, J. Vac. Sci. Technol., B, 2010, vol. 28, no. 2, pp. 223–262.

    Article  CAS  Google Scholar 

  5. Raoux, S. and Wuttig, M., Phase Change Materials: Science and Applications, New York: Springer, 2009.

    Book  Google Scholar 

  6. Raoux, S., Welnic, W., and Ielmini, D., Phase change materials and their application to nonvolatile memories, Chem. Rev., 2010, vol. 110, pp. 240–267.

    Article  CAS  Google Scholar 

  7. Tominaga, J., Shima, T., Fons, P., Simpson, R., Kuwahara, M., and Kolobov, A., What is the origin of activation energy in phase-change film?, Jpn. J. Appl. Phys., 2009, vol. 48, paper 03A053.

  8. Ahn, C., Lee, B., Jeyasingh, R.G.D., Asheghi, M., Hurkx, G.A.M., Goodson, K.E., and Philip Wong, H.-S., Crystallization properties and their drift dependence in phase-change memory studied with a micro-thermal stage, J. Appl. Phys., 2011, vol. 110, paper 114520.

  9. Kozyukhin, S., Vorobyov, Yu., Sherchenkov, A., Babich, A., Vishnyakov, N., and Boytsova, O., Isothermal crystallization of Ge2Sb2Te5 amorphous thin films and estimation of information reliability of PCM cells, Phys. Status Solidi A, 2016, pp. 1–8.

    Google Scholar 

  10. Abu El-Oyoun, M., An investigation of the kinetic transformation mechanism of Ge12.5Te87.5 chalcogenide glass under non-isothermal regime, J. Non-Cryst. Solids, 2011, vol. 357, pp. 1729–1735.

    Article  CAS  Google Scholar 

  11. Vyazovkin, S., Modification of the integral isoconversional method to account for variation in the activation energy, J. Comput. Chem., 2011, vol. 22, pp. 178–183.

    Article  Google Scholar 

  12. Lyon, R.E., An integral method of nonisothermal kinetic analysis, Thermochim. Acta, 1997, vol. 297, pp. 117–124.

    Article  CAS  Google Scholar 

  13. Badea, M., Budrugeac, P., Cucos, A., and Eugen, S., Thermal decomposition kinetics of bis(pyridine)manganese(II) chloride, J. Therm. Anal. Calorim., 2014, vol. 115, pp. 1999–2005.

    Article  CAS  Google Scholar 

  14. Svoboda, R. and Malek, J., Is the original Kissinger equation obsolete today?, J. Therm. Anal. Calorim., 2014, vol. 115, pp. 1961–1967.

    Article  CAS  Google Scholar 

  15. Muraleedharn, K. and Kripa, S., DSC kinetics of the thermal decomposition of copper(II) oxalate by isoconversional and maximum rate (peak) methods, J. Therm. Anal. Calorim., 2014, vol. 115, pp. 1969–1978.

    Article  Google Scholar 

  16. Tian, L., Chen, H., Chen, Z., Wang, X., and Zhang, S., A study of non-isothermal kinetics of limestone decomposition in air (O2/N2) and oxy-fuel (O2/CO2) atmospheres, J. Therm. Anal. Calorim., 2014, vol. 115, pp. 45–53.

    Article  CAS  Google Scholar 

  17. Kennedy, A. and Clark, S.M., A new method for the analysis of nonisothermal DSC and diffraction data, Thermochim. Acta, 1997, vol. 307, pp. 27–35.

    Article  CAS  Google Scholar 

  18. Coats, A.W. and Redfern, J.P., Kinetic parameters from thermogravimetric data, Nature, 1964, vol. 201, pp. 68–69.

    Article  CAS  Google Scholar 

  19. Brown, M.E., Handbook of Thermal Analysis and Calorimetry, vol. 1: Principles and Practice, Amsterdam: Elsevier, 1998.

    Google Scholar 

  20. Jankovic, B., Kinetics analysis of the non-isothermal decomposition of potassium metabisulfite using the model-fitting and isoconversional (model-free) methods, Chem. Eng. J., 2008, vol. 139, pp. 128–135.

    Article  CAS  Google Scholar 

  21. Hu, C., Mi, J., Shang, S., and Shangguan, J., The study of thermal decomposition kinetics of zinc oxide formation from zinc oxalate dehydrate, J. Therm. Anal. Calorim., 2014, vol. 115, pp. 1119–1125.

    Article  CAS  Google Scholar 

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Authors and Affiliations

  1. MIET National Research University of Electronic Technology, pl. Shokina 1, Zelenograd, Moscow, 124498, Russia

    A. A. Sherchenkov, A. V. Babich, P. I. Lazarenko & A. I. Vargunin

  2. Kurnakov Institute of General and Inorganic Chemistry, Russian Academy of Sciences, Leninskii pr. 31, Moscow, 119991, Russia

    S. A. Kozyukhin

  3. Tomsk State University, pr. Lenina 36, Tomsk, 634050, Russia

    S. A. Kozyukhin

Authors
  1. A. A. Sherchenkov
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  2. S. A. Kozyukhin
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  3. A. V. Babich
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  4. P. I. Lazarenko
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  5. A. I. Vargunin
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Correspondence to S. A. Kozyukhin.

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Original Russian Text © A.A. Sherchenkov, S.A. Kozyukhin, A.V. Babich, P.I. Lazarenko, A.I. Vargunin, 2017, published in Neorganicheskie Materialy, 2017, Vol. 53, No. 1, pp. 21–25.

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Sherchenkov, A.A., Kozyukhin, S.A., Babich, A.V. et al. Integral isoconversional method for evaluating crystallization parameters of thin films of Ge2Sb2Te5 phase change memory materials. Inorg Mater 53, 45–49 (2017). https://doi.org/10.1134/S0020168517010150

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  • DOI: https://doi.org/10.1134/S0020168517010150

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