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X-ray spectroscopic study of the electronic structure of boron carbonitride films obtained by chemical vapor deposition on Co/Si and CoO x /Si substrates

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Abstract

Boron carbonitride films are synthesized by chemical vapor deposition from a mixture of triethylamine borane and ammonia on a metallic or oxidized cobalt sublayer sprayed over Si(100) substrates. Scanning electron microscopy shows that the surface of a BC x N y /Co/Si sample has a homogeneous fine-grained structure; filamentous entities are found on the surface of the BC x N y /CoO x /Si sample. The electronic structure of the films is investigated by X-ray photoelectron spectroscopy (XPS) and near-edge X-ray absorption fine structure spectroscopy (NEXAFS). An analysis of the spectra shows that BC x N y films are composed of graphite and hexagonal boron nitride (h-BN) regions and complex BC x N y O z components with B-C, N-C, B-O, N-O, and C-O bonds. The deposition of the BC x N y film on the oxidized Co sublayer results in an increase in the number of C-O, N-O, B-O, and C-N bonds and a decrease of the graphite and h-BN components and in the number of C-B bonds. The XPS data are used to estimate the surface elemental composition of the BC x N y /CoO x /Si sample. It is found that the film consists of 66 at.% graphite component and 3 at.% h-BN; the proportion of complex C0.46B0.11N0.05O0.38 components is 31 at.%.

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Authors and Affiliations

  1. A. V. Nikolaev Institute of Inorganic Chemistry, Siberian Division, Russian Academy of Sciences, Novosibirsk, Russia

    Yu. V. Fedoseeva, M. L. Kosinova, S. A. Prokhorova, I. S. Merenkov, L. G. Bulusheva, A. V. Okotrub & F. A. Kuznetsov

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  1. Yu. V. Fedoseeva
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  2. M. L. Kosinova
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  3. S. A. Prokhorova
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  4. I. S. Merenkov
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  5. L. G. Bulusheva
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  6. A. V. Okotrub
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  7. F. A. Kuznetsov
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Additional information

Original Russian Text Copyright © 2012 by Yu. V. Fedoseeva, M. L. Kosinova, S. A. Prokhorova, I. S. Merenkov, L. G. Bulusheva, A. V. Okotrub, F. A. Kuznetsov

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Translated from Zhurnal Strukturnoi Khimii, Vol. 53, No. 4, pp. 701–709, July–August, 2012.

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Fedoseeva, Y.V., Kosinova, M.L., Prokhorova, S.A. et al. X-ray spectroscopic study of the electronic structure of boron carbonitride films obtained by chemical vapor deposition on Co/Si and CoO x /Si substrates. J Struct Chem 53, 690–698 (2012). https://doi.org/10.1134/S0022476612040117

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  • DOI: https://doi.org/10.1134/S0022476612040117

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