1. Special issue of the 8th International Workshop on High Aspect Ratio Micro Structure Technology, HARMST 2009

   • Sven Achenbach
   • David Klymyshyn
   • Bernd Michel

   Editorial 12 June 2010 Pages: 1285 - 1285

   

2. First automated production line for X-ray-LIGA (FELIG) is brought on line

   • Lothar Hahn
   • Georg Schwartz
   • Joachim Schulz

   Technical Paper 01 December 2009 Pages: 1287 - 1292

   

3. Synchrotron laboratory for micro and nano devices: facility concept and design

   • Sven Achenbach
   • Venkat Subramanian
   • Garth Wells

   Technical Paper 04 May 2010 Pages: 1293 - 1298

   

4. Polyimide-based X-ray masks with advanced performance of pattern accuracy and thermal stability

   • Seichin Kinuta
   • Yoshiaki Saita
   • Sumio Hosaka

   Technical Paper 22 May 2010 Pages: 1299 - 1302

   

5. Fabrication of X-rays mask with carbon membrane for diffraction gratings

   • Naoki Takahashi
   • Hiroshi Tujii
   • Tadashi Hattori

   Technical Paper 04 March 2010 Pages: 1303 - 1307

   

6. Fabrication of high precision X-ray mask for X-ray grating of X-ray Talbot interferometer

   • Daiji Noda
   • Hiroshi Tsujii
   • Tadashi Hattori

   Technical Paper 17 April 2010 Pages: 1309 - 1313

   

7. Fabrication of X-ray imaging zone plates by e-beam and X-ray lithography

   • Longhua Liu
   • Gang Liu
   • Yangchao Tian

   Technical Paper 18 December 2009 Pages: 1315 - 1321

   

8. Inclination of mold pattern’s sidewalls by combined technique with photolithography at defocus-positions and electroforming

   • Harutaka Mekaru
   • Osamu Koizumi
   • Masaharu Takahashi

   Technical Paper 25 December 2009 Pages: 1323 - 1330

   

9. Study on fabrication of 3-D microstructures by synchrotron radiation based on pixels exposed lithography

   • Mitsuhiro Horade
   • Susumu Sugiyama

   Technical Paper 12 February 2010 Pages: 1331 - 1338

   

10. Resist-less patterning on SiO₂ by combination of X-ray exposure and vapor HF etching

    • Harutaka Mekaru
    • Makoto Fujimaki
    • Masaharu Takahashi

    Technical Paper 24 December 2009 Pages: 1339 - 1346

    

11. Method development for epoxy resin analysis

    • Sawa Nordt
    • Harald Pasch
    • Wolfgang Radke

    Technical Paper 26 January 2010 Pages: 1347 - 1351

    

12. Electroplating of nickel films at ultra low electrolytic temperature

    • Chen-Kuei Chung
    • W. T. Chang
    • S. T. Hung

    Technical Paper 29 November 2009 Pages: 1353 - 1359

    

13. Electropolishing as a method for deburring high aspect ratio nickel RF MEMS

    • Stephanie Kissling
    • Klaus Bade
    • David M. Klymyshyn

    Technical paper 03 April 2010 Pages: 1361 - 1367

    

14. Fabrication of high hardness Ni mold with electroless nickel–boron thin layer

    • Yoshitaka Sawa
    • Kenji Yamashita
    • Tadashi Hattori

    Technical Paper 25 December 2009 Pages: 1369 - 1375

    

15. High aspect ratio micromolds for the electroplating of micro electro discharge machining tools

    • Ornwasa Traisigkhachol
    • Hans H. Gatzen

    Technical Paper 21 January 2010 Pages: 1377 - 1383

    

16. Development of separated micromold system for an efficient replication of high aspect ratio microstructures

    • Bong-Kee Lee
    • Tai Hun Kwon

    Technical Paper 24 December 2009 Pages: 1385 - 1392

    

17. A polymer-metal hybrid flexible mould and application for large area hot roller embossing

    • Xuechuan Shan
    • L. Jin
    • C. W. Lu

    Technical Paper 24 December 2009 Pages: 1393 - 1398

    

18. 3D UV-microreplication using cylindrical PDMS mold

    • Dongkeon Lee
    • Harutaka Mekaru
    • Ryutaro Maeda

    Technical Paper 15 December 2009 Pages: 1399 - 1411

    

19. How mold inserts influence the replication of metallic microparts produced by electroplating into two-component templates

    • Juergen Prokop
    • Jochen Heneka
    • Juergen Hausselt

    Technical Paper 14 February 2010 Pages: 1413 - 1418

    

20. Ceramic micro parts produced by micro injection molding: latest developments

    • Tobias Müller
    • Volker Piotter
    • Juergen Hausselt

    Technical Paper 30 December 2009 Pages: 1419 - 1423

    

21. Theoretical and experimental characterization of wettability of various nanolens arrayed polymer surfaces replicated with nanodimpled aluminum mold insert

    • Jihoon Yeo
    • Jejun Ryu
    • Dong Sung Kim

    Technical Paper 19 May 2010 Pages: 1425 - 1430

    

22. Fabrication of micro-capacitive inclination sensor by resin molding

    • Hiroaki Miyake
    • Kazufumi Nishimoto
    • Tadashi Hattori

    Technical Paper 24 February 2010 Pages: 1431 - 1437

    

23. Molding and hot forming techniques for fabricating plastic aspheric lenses with high blue-light transmittance

    • Kuo-Yung Hung
    • Yi-Ko Chen
    • Der-Chi Shye

    Technical Paper 06 November 2009 Pages: 1439 - 1444

    

24. Applying SU-8™ to the fabrication of micro electro discharge machining electrodes

    • Ornwasa Traisigkhachol
    • Hermann Schmid
    • Hans H. Gatzen

    Technical Paper 03 February 2010 Pages: 1445 - 1450

    

25. Effect of oxalic acid concentration on the formation of anodic aluminum oxide using pulse anodization at room temperature

    • Chen-Kuei Chung
    • T. Y. Liu
    • W. T. Chang

    Technical Paper 07 November 2009 Pages: 1451 - 1456

    

26. The effect of the aspect ratio on the hydrophobicity of microstructured polydimethylsiloxane (PDMS) robust surfaces

    • Jihoon Yeo
    • Dong Sung Kim

    Technical Paper 01 June 2010 Pages: 1457 - 1463

    

27. Immunoassay using poly-tetrafluoroethylene microstructure in organic solvent

    • Yoshiaki Ukita
    • Saki Kondo
    • Yuichi Utsumi

    Technical Paper 27 March 2010 Pages: 1465 - 1470

    

28. Fast replication of out-of-plane microlens with polydimethylsiloxane and curable polymer (NOA73)

    • Guocheng Shao
    • Weiping Qiu
    • Wanjun Wang

    Technical Paper 21 January 2010 Pages: 1471 - 1477

    

29. Fabrication of microcoils with narrow and high aspect ratio coil lines

    • Daiji Noda
    • Masaru Setomoto
    • Tadashi Hattori

    Technical Paper 29 January 2010 Pages: 1479 - 1483

    

30. Manufacture of microfluidic glass chips by deep plasma etching, femtosecond laser ablation, and anodic bonding

    • S. Queste
    • R. Salut
    • Chantal G. Khan Malek

    Technical Paper 26 January 2010 Pages: 1485 - 1493

    

31. Direct bonding of PFTF sheets assisted by shynchrotron radiation induced surface modification

    • Yuichi Utsumi
    • Shigeaki Yamamoto
    • Masaaki Okubo

    Technical Paper 09 February 2010 Pages: 1495 - 1500

    

32. Solvent-assisted low pressure room temperature lamination of low temperature cofirable ceramic green tapes for formation of embedded micro channels

    • Xuechuan Shan
    • H. P. Maw
    • C. W. Lu

    Technical Paper 25 December 2009 Pages: 1501 - 1506

    

33. A vibrating micro-scale CMM probe for measuring high aspect ratio structures

    • James D. Claverley
    • Richard K. Leach

    Technical Paper 24 December 2009 Pages: 1507 - 1512

    

34. Thickness measurement in ultrathick multilayer microstructures

    • Rainer Engelke
    • Uwe Richter

    Technical Paper 05 March 2010 Pages: 1513 - 1516

    

35. Methods for simulating and optimizing molded micro components and systems

    • Albert Albers
    • Hans-Georg Enkler
    • Pablo Leslabay

    Technical Paper 01 April 2010 Pages: 1517 - 1527

    

36. Micro gear validation: improving the correlation between virtual and physical testing

    • Albert Albers
    • Peter Börsting
    • Pablo Leslabay

    Technical Paper 06 January 2010 Pages: 1529 - 1535

    

37. Patterns for design in microtechnology

    • Albert Albers
    • Tobias Deigendesch
    • Tobias Müller

    Technical Paper 19 February 2010 Pages: 1537 - 1545

    

38. In situ diagnostic capabilities for beam position and beam intensity monitoring at SyLMAND

    • Venkat Subramanian
    • Sven Achenbach
    • Martin Augustin

    Technical Paper 11 May 2010 Pages: 1547 - 1551

    

39. Development of a biological detection platform utilizing a modular microfluidic stack

    • Niklas Frische
    • Proyag Datta
    • Jost Goettert

    Technical Paper 09 March 2010 Pages: 1553 - 1561

    

40. Design and microfabrication of a polymer membrane-based submicron scale electrophoretic flow detector for biomedical applications

    • Manouchehr Hashemi
    • Sven Achenbach
    • Jeremy Lee

    Technical Paper 31 December 2009 Pages: 1563 - 1567

    

41. Design, fabrication, and test of an on-chip micro flow cytometer with integrated out-of-plane microlenses

    • Guocheng Shao
    • Wanjun Wang

    Technical Paper 30 May 2010 Pages: 1569 - 1576

    

42. Vertical liquid transportation through capillary bundle structure using centrifugal force

    • Saki Kondo
    • Tsukasa Azeta
    • Yuichi Utsumi

    Technical Paper 10 June 2010 Pages: 1577 - 1580

    

43. Micro gear pump with internal electromagnetic drive

    • Andreas Waldschik
    • Stephanus Büttgenbach

    Technical Paper 04 February 2010 Pages: 1581 - 1587

    

44. Micro liquid rotor operated by surface-acoustic-wave

    • Tsunemasa Saiki
    • Katsuhide Okada
    • Yuichi Utsumi

    Technical Paper 18 February 2010 Pages: 1589 - 1594

    

45. Design and mixing efficiency of rhombic micromixer with flat angles

    • C. K. Chung
    • T. R. Shih
    • C. K. Chang

    Technical Paper 18 December 2009 Pages: 1595 - 1600

    

46. Hot embossing of poly(lactic acid) films for an embedded cochlear implant stiffener

    • R. Tewari
    • C. Friedrich

    Technical Paper 20 April 2010 Pages: 1601 - 1607

    

47. Easily manageable, electrothermally actuated silicon micro gripper

    • B. Hoxhold
    • S. Büttgenbach

    Technical Paper 06 February 2010 Pages: 1609 - 1617

    

48. Fabrication of cone-like microstructure using UV LIGA-like for light guide plate application

    • C. K. Chung
    • K. L. Sher
    • C. C. Cheng

    Technical Paper 06 January 2010 Pages: 1619 - 1624

    

49. Fabrication of UV range light guide plate

    • Yuta Okayama
    • Kenji Yamashita
    • Tadashi Hattori

    Technical Paper 20 February 2010 Pages: 1625 - 1631

    

50. Ultra light-weight and high-resolution X-ray mirrors using DRIE and X-ray LIGA techniques for space X-ray telescopes

    • Yuichiro Ezoe
    • Ikuyuki Mitsuishi
    • Ryutaro Maeda

    Technical Paper 23 December 2009 Pages: 1633 - 1641