A vibrating micro-scale CMM probe for measuring high aspect ratio structures
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This paper describes the development and initial testing of a novel three-axis vibrating micro-scale co-ordinate measuring machine (micro-CMM) probe. The vibrating micro-CMM probe is designed to address the needs of micro-manufacturing industry, in particular the requirement to measure high aspect ratio micrometre sized features to nanometre accuracy. The vibrating micro-CMM probe was also designed to address the problems inherent with micrometre and nanometre scale co-ordinate measurements caused by surface interaction forces. The initial concepts were first developed using extensive computational modelling and materials analysis. Production techniques were also investigated. The result was a micro-CMM probe consisting of three flexures, instrumented with piezoelectric actuators and sensors. The micro-CMM probe is capable of controlled vibrations in three axes; an essential feature of the design that directly addresses the problems inherent with tactile CMM probe interactions with measurement surfaces on the micrometre and nanometre scale. The ability of this micro-CMM probe to accurately measure high aspect ratio features will be dependant on the aspect ratio of the stylus. Investigations have been conducted to determine the optimum dimensions of the stylus.
KeywordsMeasurement Surface National Physical Laboratory Flexure Hinge Capacitance Sensor Laser Vibrometer
The authors would like to acknowledge the National Measurement System Engineering Measurements Programme (2008–2011) and the EPSRC 3D-Mintegration Grand Challenge Project, which provided the funding for this research.
- Haitjema H, Pril WO, Schellekens PHJ (2001) Development of a silicon-based nanoprobe system for 3-D measurements. Ann. CIRP 50/1/2001, pp 365–368Google Scholar
- Leach RK (2009) Fundamental principles of engineering nanometrology. Elsevier, Amsterdam. ISBN: 978-0-08-096454-6Google Scholar
- Lewis AJ (2003) A fully traceable miniature CMM with sub-micrometre uncertainty. In: Proc. SPIE 5190, pp 265–276Google Scholar
- Meli F, Fracheboud M, Bottinelli S, Bieri M, Thalmann R, Breguet J-M, Clavel R (2003) High precision, low force 3D touch probe for measurements on small objects. In: Proceedings of euspen int. topical conference, Aachen, GermanyGoogle Scholar
- Smale D, Ratchev S, Segal J, Leach RK, Claverley JD (2009) Assembly of the stem and tip of an innovative micro-CMM probe. In: Proc. Lamdamap 2009, Brunel University, UK, 30th June–2nd July 2009, pp 442–451Google Scholar
- Stoyanov S, Bailey C, Leach RK, Hughes B, Wilson A, O’Neill W, Dorey RA, Shaw C, Underhill D, Almond HJ (2008) Modeling and prototyping the conceptual design of 3D CMM micro-probe. In: Proc. 2nd ESITC, Greenwich, 1st–4th Sept 2008, pp 193–198Google Scholar
- Sun Y, Fowkes CR, Gindy N, Leach RK (2009) Variation risk analysis: MEMS fabrication tolerance for a micro CMM probe. Int J Adv Manuf Technol. doi: 10.1007/s00170-009-2251-0
- Swallow KW (2008) 3-D microprobe metrology. Report prepared under prime contract for the US Department of Energy by Honeywell Federal Manufacturing & TechnologiesGoogle Scholar
- Wilson A, Leach RK (2009) Development of an NPL micro-probe: the micro-stylus component. NPL report ENG 15. ISSN 1754-2987Google Scholar