3D microstructure fabrication for a high luminosity lighting-panel for LCD using synchrotron radiation M. MinamitaniY. UtsumiT. Hattori OriginalPaper Pages: 230 - 234
Improvement of capillary electrophoresis property for microchannels fabricated by deep X-ray lithography Y. UtsumiM. OzakiT. Hattori OriginalPaper Pages: 235 - 239
MODULIGA: The LIGA process as a modular production method-current standardization status in Germany L. HahnP. MeyerL. Singleton OriginalPaper Pages: 240 - 245
Micro-ECM for production of microsystems with a high aspect ratio R. FörsterA. SchothW. Menz OriginalPaper Pages: 246 - 249
Micro wire EDM for high aspect ratio 3D microstructuring of ceramics and metals A. SchothR. FörsterW. Menz OriginalPaper Pages: 250 - 253
Knowledge-based design environment for primary shaped micro parts A. AlbersN. BurkardtJ. Marz OriginalPaper Pages: 254 - 260
The lifetime comparison of Ni and Ni-PTFE moulding inserts with high aspect-ratio structure Y. TianP. ZhangX. Tian OriginalPaper Pages: 261 - 264
Simulation of deep UV lithography with SU-8 resist by using 365 nm light source X. TianG. LiuX. Zhang OriginalPaper Pages: 265 - 270
Fabrication of ceramic microcomponents using deep X-ray lithography C. MüllerT. HanemannJ. Goettert OriginalPaper Pages: 271 - 277
Fabrication of diamond micro tools for ultra precision machining E. Ritzhaupt-KleisslC. MüllerP. Gluche OriginalPaper Pages: 278 - 279
Carbon paper flow fields made by WEDM for small fuel cells M. A. MüllerC. MüllerW. Menz OriginalPaper Pages: 280 - 281
Deep photo-lithography characterization of SU-8 resist layers E. F. ReznikovaJ. MohrH. Hein OriginalPaper Pages: 282 - 291
Coupling bulge testing and nanoindention to characterize materials properties of bulk micromachined structures M. S. KennedyA. L. OlsonD. F. Bahr OriginalPaper Pages: 298 - 302
Optimisation of SU-8 processing parameters for deep X-ray lithography R. L. BarberM. K. GhantasalaD. C. Mancini OriginalPaper Pages: 303 - 310
Fabrication of microneedle array using LIGA and hot embossing process Sang Jun MoonSeung S. LeeT. H. Kwon OriginalPaper Pages: 311 - 318
Corrosion behavior of a structural nickel electrodeposit F. D. WallM. A. MartinezJ. J. Vandenavyle OriginalPaper Pages: 319 - 330
Experimental study of NiFe and CoFe throughmask electrodeposition of high aspect ratio features J. J. KellyN. Y. C. Yang OriginalPaper Pages: 331 - 334
Design and simulation of an asymmetric variable reluctance stepping millimotor W.-Y. LuE.J. GarciaJ.S. Korellis OriginalPaper Pages: 335 - 342
Fabrication of high-aspect-ratio microstructures using SU8 photoresist G. LiuY. TianY. Kan OriginalPaper Pages: 343 - 346
Fabrication of high-aspect-ratio hydrogel microstructures V. R. TirumalaR. DivanG. T. Caneba OriginalPaper Pages: 347 - 352
Effects of contact-stress on hot-embossed PMMA microchannel wall profile K. F. LeiW. J. LiY. Yam OriginalPaper Pages: 353 - 357
Deep X-ray lithography using mask with integrated electrothermal actuator K.-C. LeeS.S. Lee OriginalPaper Pages: 358 - 364
Application of 3D gray mask for the fabrication of curved SU-8 structures Kuo-Yung HungFan-Gang TsengHwai-Pwu Chou OriginalPaper Pages: 365 - 369
Low cost transparent SU-8 membrane mask for deep X-ray lithography S. CabriniF. PérennèsE.Di. Fabrizio OriginalPaper Pages: 370 - 373
Micro-Structures of TiC/Ti5Si3 composite produced by powder metallurgy and LIGA process N. MiyanoH. IwasaS. Sugiyama OriginalPaper Pages: 374 - 378
Large batch dimensional metrology demonstrated in the example of a LIGA fabricated spring G. AigeldingerJ. T. CeremugaD. M. Skala OriginalPaper Pages: 379 - 384