3D microstructure fabrication for a high luminosity lighting-panel for LCD using synchrotron radiation

Abstract

The Lighting-Panel (LP) for liquid crystal display (LCD) which leads the light from the illuminating LED (Light Emitting Diode) to the front panel, is one of the key parts of Personal Digital Assistants (PDA) for decreasing power consumption. We developed the high luminosity lighting panel for LCD with the accurate 3D microstructures using deep X-ray lithography and optical properties were also evaluated. The fabricated LP’s showed good homogeneous luminosity distributions and the mean luminosity evaluated from the 2D distribution measurement were more than 800 cd/m² and the luminescence efficiency was about 30 cd/m²/mA. It is notable that the mean luminosity for the LP with the cone pit patterns increases 1.5times higher than the value of the LP with the cylindrical pit patterns. Furthermore we improved the total micro process for mass LP fabrication, the deep X-ray lithography, electroforming and molding for mass production.