1. Dislocation configurations in Si/Si_xGe_1-x strained layer heterostructures

   • Krishna Rajan

   OriginalPaper Pages: 1009 - 1013

2. Oxygen and carbon incorporation in low temperature epitaxial Si films grown by rapid thermal chemical vapor deposition (RTCVD)

   • M. L. Green
   • D. Brasen
   • H. Temkin

   OriginalPaper Pages: 1015 - 1019

3. NMOSFET characteristics on a double hetero-epitaxial Si/γ-Al₂O₃/Si structure fabricated by a new MBE growth method

   • H. Hanafusa
   • H. Ogata

   OriginalPaper Pages: 1021 - 1025

4. Very low defect remote hydrogen plasma clean of Si (100) for homoepitaxy

   • B. Anthony
   • T. Hsu
   • A. Tasch

   OriginalPaper Pages: 1027 - 1032

5. The influence of defects on device performance of MBE-grown Si homojunction and strained Si_1-xGe_x/Si heterostructures

   • D. X. Xu
   • G. D. Shen
   • G. V. Hansson

   OriginalPaper Pages: 1033 - 1041

6. Defect microstructure in single crystal silicon thin films grown at 150° C-305° C by remote plasma-enhanced chemical vapor deposition

   • T. Hsu
   • B. Anthony
   • W. Harrington

   OriginalPaper Pages: 1043 - 1050

7. In situ temperature measurement by infrared absorption for low-temperature epitaxial growth of homo- and hetero-epitaxial layers on silicon

   • J. C. Sturm
   • P. V. Schwartz
   • P. M. Garone

   OriginalPaper Pages: 1051 - 1054

8. Silicon molecular beam epitaxy: Highlights of recent work

   • John C. Bean

   OriginalPaper Pages: 1055 - 1059

9. Low thermal budget solid phase epitaxial growth of CaF₂ on Si (111) substrates

   • R. Singh
   • R. P. S. Thakur
   • A. B. Swartzlander

   OriginalPaper Pages: 1061 - 1064

10. Low temperature, defect-free silicon epitaxy using a low kinetic energy particle process

    • Tadashi Shibata
    • Tadahiro Ohmi

    OriginalPaper Pages: 1065 - 1073

11. Reduced pressure and temperature epitaxial silicon CVD kinetics and applications

    • J. L. Regolini
    • D. Bensahel
    • J. Mercier

    OriginalPaper Pages: 1075 - 1081

12. Heavily P-doped (≥10²¹ cm^-3) Si and SiGe films grown by photo-CVD at 250° C

    • A. Yamada
    • Y. Jia
    • K. Takahashi

    OriginalPaper Pages: 1083 - 1087

13. Remote plasma-enhanced CVD of silicon: Reaction kinetics as a function of growth parameters

    • B. Anthony
    • T. Hsu
    • A. Tasch

    OriginalPaper Pages: 1089 - 1094

14. Low-temperature epitaxy using Si₂H₆

    • F. Mieno
    • Y. Furumura

    OriginalPaper Pages: 1095 - 1100

15. The kinetics of dislocation glide in SiGe alloy layers

    • C. G. Tuppen
    • C. J. Gibbings

    OriginalPaper Pages: 1101 - 1106

16. In situ STM characterisation of epitaxial layers in a 3-inch MBE system

    • R. Butz
    • H. Wagner

    OriginalPaper Pages: 1107 - 1110

17. Three dimensional devices fabricated by silicon epitaxial lateral overgrowth

    • G. W. Neudeck
    • P. J. Schubert
    • J. P. Denton

    OriginalPaper Pages: 1111 - 1117

18. Delta doping superlattices in silicon

    • H. P. Zeindl
    • E. Hammerl
    • I. Eisele

    OriginalPaper Pages: 1119 - 1122

19. Selective silicon epitaxial growth on a submicrometer WSi₂ grating: Application to the permeable base transistor

    • P. A. Badoz
    • D. Bensahel
    • J. L. Regolini

    OriginalPaper Pages: 1123 - 1127

20. Rapid thermal chemical vapor deposition of germanium on silicon and silicon dioxide and new applications of ge in ULSI technologies

    • M. C. Öztürk
    • D. T. Grider
    • P. Russell

    OriginalPaper Pages: 1129 - 1134

21. Grain growth mechanism in boron doped polycrystalline silicon

    • S. Kalainathan
    • R. Dhanasekaran
    • P. Ramasamy

    OriginalPaper Pages: 1135 - 1139

22. Selective area growth of GaAs with semiconductor-metal-semiconductor structures using pulsed-mode operation of MOCVD

    • Chang-Hee Hong
    • Chang-Tae Kim
    • Young-Se Kwon

    OriginalPaper Pages: 1141 - 1144

23. Shallow, small area, TiSi₂ contacts to n⁺ and p⁺ silicon

    • A. H. Perera
    • J. P. Krusius

    OriginalPaper Pages: 1145 - 1149

24. Metallizations for electronics applications

    Forward Pages: 1151 - 1151