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Shape and topology optimization for tailoring the ratio between two flexural eigenfrequencies of atomic force microscopy cantilever probe

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Abstract

In an operation mode of atomic force microscopy that uses a higher eigenmode to determine the physical properties of material surface, the ratio between the eigenfrequency of a higher flexural eigenmode and that of the first flexural eigenmode was identified as an important parameter that affects the sensitivity and accessibility. Structure features such as cut-out are often used to tune the ratio of eigenfrequencies and to enhance the performance. However, there lacks a systematic and automatic method for tailoring the ratio. In order to deal with this issue, a shape and topology optimization problem is formulated, where the ratio between two eigenfrequencies is defined as a constraint and the area of the cantilever is maximized. The optimization problem is solved via the level set based method.

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Authors and Affiliations

  1. The State Key Laboratory of Digital Manufacturing Equipment and Technology, Huazhong University of Science and Technology, Wuhan, 430074, China

    Qi Xia, Tao Zhou & Tielin Shi

  2. Department of Mechanical and Automation Engineering, The Chinese University of Hong Kong, Shatin, NT, Hong Kong, China

    Michael Yu Wang

Authors
  1. Qi Xia
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  2. Tao Zhou
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  3. Michael Yu Wang
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  4. Tielin Shi
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Correspondence to Qi Xia.

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Xia, Q., Zhou, T., Wang, M.Y. et al. Shape and topology optimization for tailoring the ratio between two flexural eigenfrequencies of atomic force microscopy cantilever probe. Front. Mech. Eng. 9, 50–57 (2014). https://doi.org/10.1007/s11465-014-0286-x

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  • DOI: https://doi.org/10.1007/s11465-014-0286-x

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