Skip to main content
SpringerLink
Log in

Sample geometry effect on mechanical property of gold micro-cantilevers by micro-bending test

  • Published:
MRS Communications Aims and scope Submit manuscript

Abstract

Sample geometry effects on mechanical strengths of gold micro-cantilevers are evaluated by a micro-bending test. Six micro-cantilevers with the same length of 50 μm are prepared, and the width and the thickness are varied to examine individual effects on the yield stress. The yield stress increases from 428 to 519 MPa when the thickness decreases from 11.1 to 6.0 μm. No obvious dependency is observed when varying the width. The results reveal that the thickness and the width each has a different influence on the yield stresses of micro-cantilevers evaluated by the bending test, which is the sample geometry effect.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Table I.
Figure 1.
Figure 2.
Figure 3.

Similar content being viewed by others

References

  1. M. Lemkin and B.E. Boser: A three-axis micromachined accelerometer with a CMOS position sense interface and digital offset-trim electronics. IEEE J. Solid-State Circ. 34, 456 (1999).

    Article  Google Scholar 

  2. D. Yamane, T. Matsushima, K. Machida, H. Toshiyoshi, and K. Masu: Design of sub-1 g microelectromechanical systems accelerometers. Appl. Phys. Lett. 104, 074102 (2014).

    Article  Google Scholar 

  3. K. Machida, T. Konishi, D. Yamane, H. Toshiyoshi, and K. Masu: Integrated CMOS-MEMS technology and its applications. ECS Trans. 61, 21 (2014).

    Article  CAS  Google Scholar 

  4. H.D. Espinosa, B.C. Prorok, and B. Peng: Plasticity size effects in free-standing submicron polycrystalline FCC films subjected to pure tension. J. Mech. Phys. Solids 52, 667 (2004).

    Article  CAS  Google Scholar 

  5. C.Y. Chen, M. Yoshiba, T. Nagoshi, T.F.M. Chang, D. Yamane, K. Machida, K. Masu, and M. Sone: Pulse electroplating of ultra-fine grained Au films with high compressive strength. Electrochem. Commun. 67, 51 (2016).

    Article  CAS  Google Scholar 

  6. H.C. Tang, T.F.M. Chang, Y.W. Chai, C.Y. Chen, T. Nagoshi, D. Yamane, H. Ito, K. Machida, K. Masu, and M. Sone: Nanoscale hierarchical structure of twins in nanograins embedded with twins and the strengthening effect. Metals 9, 987 (2019).

    Article  CAS  Google Scholar 

  7. T. Nagoshi, M. Mutoh, T.F.M. Chang, T. Sato, and M. Sone: Sample size effect of electrodeposited nickel with sub-10 nm grain size. Mater. Lett. 117, 256 (2014).

    Article  CAS  Google Scholar 

  8. J.R. Greer, W.C. Oliver, and W.D. Nix: Size dependence of mechanical properties of gold at the micron scale in the absence of strain gradients. Acta Mater. 53, 1821 (2005).

    Article  CAS  Google Scholar 

  9. J.R. Greer and J.T.M. De Hosson: Plasticity in small-sized metallic systems: intrinsic versus extrinsic size effect. Prog. Mater. Sci. 56, 654 (2011).

    Article  CAS  Google Scholar 

  10. D. Kiener, C. Motz, T. Schöberl, M. Jenko, and G. Dehm: Determination of mechanical properties of copper at the micron scale. Adv. Eng. Mater. 8, 119 (2006).

    Article  Google Scholar 

  11. A. Rinaldi, P. Peralta, C. Friesen, and K. Sieradzki: Sample-size effects in the yield behavior of nanocrystalline nickel. Acta Mater. 56, 511 (2008).

    Article  CAS  Google Scholar 

  12. E. Demir, D. Raabe, and F. Roters: The mechanical size effect as a mean-field breakdown phenomenon: example of microscale single crystal beam bending. Acta Mater. 58, 1876 (2010).

    Article  CAS  Google Scholar 

  13. D. Kiener, W. Grosinger, G. Dehm, and R. Pippan: A further step towards an understanding of size-dependent crystal plasticity: In situ tension experiments of miniaturized single-crystal copper samples. Acta Mater. 56, 580 (2008).

    Article  CAS  Google Scholar 

  14. K. Takashima, Y. Higo, S. Sugiura, and M. Shimojo: Fatigue crack growth behavior of micro-sized specimens prepared from an electroless plated Ni-P amorphous alloy thin film. Mater. Trans. 42, 68 (2001).

    Article  CAS  Google Scholar 

  15. K. Asano, H.C. Tang, C.Y. Chen, T. Nagoshi, T.F.M. Chang, D. Yamane, T. Konishi, K. Masu, and M. Sone: Promoted bending strength in micro-cantilevers composed of nanograined gold toward MEMS applications. Microelectron. Eng. 196, 20 (2018).

    Article  CAS  Google Scholar 

  16. Y. Kihara, T. Nagoshi, T.F.M. Chang, H. Hosoda, T. Sato, and M. Sone: Tensile behavior of micro-sized specimen fabricated from nanocrystalline nickel film. Microelectron. Eng. 141, 17 (2015).

    Article  CAS  Google Scholar 

  17. W.F. Hosford: Mechanical Behavior of Materials, 2nd ed. (Cambridge University Press, New York, 2010).

    Google Scholar 

  18. E.O. Hall: The deformation and ageing of mild steel: III discussion of results. Proc. Phys. Soc. Lond. B 64, 747 (1951).

  19. N.J. Petch: The cleavage strength of polycrystals. J. Iron Steel Inst. 174, 25 (1953).

    CAS  Google Scholar 

  20. R.D. Emery and G.L. Povirk: Tensile behavior of free-standing gold films. Part I. Coarse-grained films. Acta Mater. 51, 2067 (2003).

    Article  CAS  Google Scholar 

Download references

Acknowledgment

This work was supported by JST CREST Grant No. JPMJCR1433, Japan, and the Grant-in-Aid for Scientific Research (S) (JSPS KAKENHI Grant No. 26220907).

Author information

Authors and Affiliations

  1. Institute of Innovative Research, Tokyo Institute of Technology, Yokohama, 226-8503, Japan

    Kosuke Suzuki, Tso-Fu Mark Chang, Ken Hashigata, Keisuke Asano, Chun-Yi Chen, Daisuke Yamane, Hiroyuki Ito, Katsuyuki Machida, Kazuya Masu & Masato Sone

  2. National Institute of Advanced Industrial Science and Technology, Tsukuba, 305-8560, Japan

    Takashi Nagoshi

Authors
  1. Kosuke Suzuki
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Tso-Fu Mark Chang
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. Ken Hashigata
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. Keisuke Asano
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. Chun-Yi Chen
    View author publications

    You can also search for this author in PubMed Google Scholar

  6. Takashi Nagoshi
    View author publications

    You can also search for this author in PubMed Google Scholar

  7. Daisuke Yamane
    View author publications

    You can also search for this author in PubMed Google Scholar

  8. Hiroyuki Ito
    View author publications

    You can also search for this author in PubMed Google Scholar

  9. Katsuyuki Machida
    View author publications

    You can also search for this author in PubMed Google Scholar

  10. Kazuya Masu
    View author publications

    You can also search for this author in PubMed Google Scholar

  11. Masato Sone
    View author publications

    You can also search for this author in PubMed Google Scholar

Supplementary material

Supplementary material

The supplementary material for this article can be found at https://doi.org/10.1557/mrc.2020.38.

Rights and permissions

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Suzuki, K., Chang, TF.M., Hashigata, K. et al. Sample geometry effect on mechanical property of gold micro-cantilevers by micro-bending test. MRS Communications 10, 434–438 (2020). https://doi.org/10.1557/mrc.2020.38

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1557/mrc.2020.38

Search

Navigation