Study on three-dimensional micromachining using synchrotron radiation etching N. NishiT. KatohS. Sugiyama Pages: 1 - 4
Rapid replication of polymeric and metallic high aspect ratio microstructures using PDMS and LIGA technology K. KimS. ParkC. H. Ahn Pages: 5 - 10
High performance flat miniature heat pipes fabricated by UD-LIGA process Y. ChengP. P. DingP. H. Chen Pages: 23 - 24
Improvement of dynamic characteristics for optical pickup actuator using sensitivity analysis K.-T. LeeD.-J. LeeY.-P. Park Pages: 25 - 30
Development of an efficient page-turning mechanism for automated teller machines A. MochizukiS. NoroK. Sasaki Pages: 31 - 35
Quasi-3D microstructure fabrication technique utilizing hard X-ray lithography of synchrotron radiation H. MekaruY. UtsumiT. Hattori Pages: 36 - 40
Vibration analysis of a contact slider/gimbal of a flexible disk drive Y. MuraokaH. RyosonY. Okazaki Pages: 41 - 47
Lubricant bonding, chemical structure, and additive effects on tribological performances at head–disk interfaces Z. ZhaoE. R. KarazicT. Lam Pages: 48 - 54
Production issues for high aspect ratio Lobster-eye optics using LIGA A. G. PeeleT. H. K. IrvingT. R. Christenson Pages: 55 - 60
Development of electrochemical micro machining for air-lubricated hydrodynamic bearings J.-W. ParkE.-S. LeeY.-H. Moon Pages: 61 - 66
Rapid fabrication of microcomponents – UV-laser assisted prototyping, laser micro-machining of mold inserts and replication via photomolding W. PflegingW. BernauerM. Torge Pages: 67 - 74
Analysis of self-heating phenomenon of piezoelectric microcomponents actuated harmonically R. KeoschkerjanM. HarutyunyanH. Wurmus Pages: 75 - 80
Replication techniques for ceramic microcomponents with high aspect ratios W. BauerR. KnitterE. Hansjosten Pages: 81 - 86
Tuning of a digital disk drive servo controller using fixed-structure H ∞ controller optimization W. NiuS. IbarakiM. Tomizuka Pages: 92 - 98
A MS-Windows simulation tool for synchrotron X-ray exposure and subsequent development P. MeyerC. CremersS. Megtert Pages: 104 - 108
Large-scale molecular dynamics simulations of highly accelerated cluster impact on diamond surface Y. YamaguchiJ. Gspann Pages: 109 - 112
Modeling acoustic agitation for enhanced development of PMMA resists R. H. NilsonS. K. GriffithsA. Ting Pages: 113 - 118
A passive alignment method utilizing reference posts and its application in multi-level LIGA processing Z. LingK. LianJ. Goettert Pages: 119 - 122
Visualisation of size-dependent particle deposition in a slider/disk interface J. C. van der Hoeven Pages: 123 - 129
Side wall roughness in ultradeep X-ray lithography N. MoldovanD. C. ManciniK. R. Podolak Pages: 130 - 132
A new ultrasonic catheter system with LIGA geared micromotor R. LedworuskiH. LehrJ. Tschepe Pages: 133 - 136
On optimal design of HDD suspension using topology optimization L. PanG. K. LauS.-F. Ling Pages: 137 - 146
Investigations of the influence of the laser texture design in the hard disk landing zone on the dynamic characteristics of Pico slider during contact take-off X. ZhangM. SullivanJ. Ma Pages: 147 - 154