Skip to main content
Log in

Development of electrochemical micro machining for air-lubricated hydrodynamic bearings

  • Published:
Microsystem Technologies Aims and scope Submit manuscript

Abstract

 A specially-built EMM (Electrochemical Micro Machining)/PECM (Pulse Electrochemical Machining) cell, a electrode tool filled with non-conducting material, a electrolyte flow control system and a small & stable gap control unit are developed to achieve accurate dimensions of spindle recesses. Two electrolytes, aqueous sodium nitrate and aqueous sodium chloride are investigated in this study. The former electrolyte with few pits on the surface of workpiece has better machine-ability than the latter one with many pits on the surface of workpiece. It is easier to control the machining depth precisely with pulse electrical current than direct electrical current. This paper also presents an identification method for the machining depth by in-process analysis of applied electrical current and interelectrode gap size. The interelectrode gap characteristics, including pulse electrical current, effective volumetric electrochemical equivalent and electrolyte conductivity variations, are analyzed using the model and experimental results.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Similar content being viewed by others

Author information

Authors and Affiliations

Authors

Additional information

Received: 5 July 2001/Accepted: 11 December 2001

This work was supported by Korea Research Foundation Grant (KRF-2001-041-E00095)

Paper presented at the 12th Annual Symposium on Information Storage and Processing Systems, Santa Clara, CA, USA, 28–29 June, 2001.

Rights and permissions

Reprints and permissions

About this article

Cite this article

Park, JW., Lee, ES., Won, CH. et al. Development of electrochemical micro machining for air-lubricated hydrodynamic bearings. Microsystem Technologies 9, 61–66 (2002). https://doi.org/10.1007/s00542-002-0184-8

Download citation

  • Issue Date:

  • DOI: https://doi.org/10.1007/s00542-002-0184-8

Keywords

Navigation