Volume 20, Issue 10-11

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October 2014

Special Issue: The 10th International Workshop on High Aspect Ratio Micro and Nanosystem Technologies (HARMNST), Berlin, April 21-24, 2013

Issue Editors:

Jürgen Mohr,
Bernd Michel,
Jost Goettert

50 articles in this issue

Editorial special issue HARMNST 2013
Jürgen Mohr
Jost Göttert
Bernd Michel
Editorial 05 August 2014 Pages: 1771 - 1771
Nanoimprint lithography and micro-embossing in LiGA technology: similarities and differences
Helmut Schift
Technical Paper 22 September 2013 Pages: 1773 - 1781
SAM meets MEMS: reliable fabrication of stable Au-patterns embedded in PDMS using dry peel-off process
Ikjoo Byun
Anthony W. Coleman
Beomjoon Kim
Technical Paper 06 October 2013 Pages: 1783 - 1789
ViPER: simulation software for high aspect ratio plasma etching of silicon
Valentyn Ishchuk
Burkhard E. Volland
Ivo W. Rangelow
Technical Paper 17 October 2013 Pages: 1791 - 1796
High-aspect-ratio nanoporous membranes made by reactive ion etching and e-beam and interference lithography
Ralu Divan
Olga V. Makarova
Nicolaie Moldovan
Technical Paper 13 October 2013 Pages: 1797 - 1802
IR-drying of photoresists: experimental and theoretical consideration of drying kinetics of mono- and multi-layered coatings
M. Schönfeld
S. Schubert
J. Grimm
Technical Paper 13 October 2013 Pages: 1803 - 1806
Large tuning ratio high aspect ratio variable capacitors using leveraged bending
S. Achenbach
D. T. Haluzan
J. Mohr
Technical Paper 17 November 2013 Pages: 1807 - 1813
Arrays of high-aspect ratio microchannels for high-throughput isolation of circulating tumor cells (CTCs)
Mateusz L. Hupert
Joshua M. Jackson
Steven A. Soper
Technical Paper 31 October 2013 Pages: 1815 - 1825
Fabrication of porous anodic aluminum oxide by hybrid pulse anodization at relatively high potential
C. K. Chung
M. W. Liao
O. K. Khor
Technical Paper 25 October 2013 Pages: 1827 - 1832
2^N Period submicron grating at the inner wall of a metal cylinder
H. Hirshy
S. G. Scholz
O. Parriaux
Technical Paper 01 November 2013 Pages: 1833 - 1837
Advanced mask aligner lithography (AMALITH) for thick photoresist
Reinhard Voelkel
Uwe Vogler
Ulrich Hofmann
Technical Paper 08 November 2013 Pages: 1839 - 1842
Design and fabrication of microlens arrays as beam relay for free-space optical interconnection
Zhengyu Miao
Wanjun Wang
Technical Paper 13 November 2013 Pages: 1843 - 1847
High aspect ratio gold nanopillars on microelectrodes for neural interfaces
C. Nick
S. Quednau
C. Thielemann
Technical Paper 02 November 2013 Pages: 1849 - 1857
Ferroelectric thin film fabrication by direct UV-lithography
Manuel Benkler
F. Paul
T. Hanemann
Technical Paper 27 November 2013 Pages: 1859 - 1867
Fabrication of a high aspect ratio (HAR) micropillar filter for a magnetic bead-based immunoassay
C. Ruffert
Q. Ramadan
M. A. M. Gijs
Technical Paper 13 November 2013 Pages: 1869 - 1873
Microstructuring of non-conductive silicon carbide by electrical discharge machining
Florian Zeller
Tim Hösel
Holger Reinecke
Technical Paper 07 November 2013 Pages: 1875 - 1880
A Monte Carlo study of the primary absorbed energy redistribution in X-ray lithography
P. Meyer
F. J. Pantenburg
Technical Paper 10 November 2013 Pages: 1881 - 1889
Challenges with high aspect ratio nanoimprint
Hella-Christin Scheer
A. Mayer
C. Steinberg
Technical Paper 23 November 2013 Pages: 1891 - 1898
Evaluation of Young’s modulus of imprinted hydrogen silsesquioxane pillar after residual layer removal by reactive ion etching
Yuji Kang
Yuichi Haruyama
Shinji Matsui
Technical Paper 30 November 2013 Pages: 1899 - 1903
Rapid soda-lime glass etching process for producing microfluidic channels with higher aspect ratio
Che-Hsin Lin
Kuan-Wei Chen
Tang-Yu Li
Technical Paper 30 November 2013 Pages: 1905 - 1911
Micro porous polymer foil for application in evaporation cooling
Evelyn Drabiniok
Andreas Neyer
Technical Paper 01 December 2013 Pages: 1913 - 1918
Rapid-manufacturing of micro-structured devices based on MWCNTs/PP composites by using hot embossing replication process
Jie Zhang
Mohamed Sahli
Chantal Khan-Malek
Technical Paper 30 November 2013 Pages: 1919 - 1924
Low cost method for hot embossing of microstructures on PMMA by SU-8 masters
Alireza Shamsi
Ali Amiri
Mehrnaz Esfandiari
Technical Paper 15 December 2013 Pages: 1925 - 1931
Rapid and low cost replication of complex microfluidic structures with PDMS double casting technology
Luxia Yang
Xiaojian Hao
Wanjun Wang
Technical Paper 19 December 2013 Pages: 1933 - 1940
Nano-microscale moulding of some metal plates with high strength Ni–W alloy moulds
Tohru Yamasaki
Masahiro Yamada
Yoshihiko Yokoyama
Technical Paper 17 December 2013 Pages: 1941 - 1948
High-aspect-ratio nanoimprinted structures for a multi-pole magnetic scale
Zhi-Hao Xu
Chien-Li Wu
Tsung-Shune Chin
Technical Paper 27 December 2013 Pages: 1949 - 1953
“LIGA2.X” process for mass production of single polymeric LIGA micro parts
J. Heneka
M. Guttmann
V. Saile
Technical Paper 10 December 2013 Pages: 1955 - 1960
Direct imprinting of organic–inorganic hybrid materials into high aspect ratio sub-100 nm structures
V. J. Cadarso
T. Kiefer
J. Brugger
Technical Paper 11 December 2013 Pages: 1961 - 1966
Hot embossing of transparent high aspect ratio micro parts
A. Kolew
M. Heilig
M. Worgull
Technical Paper 05 December 2013 Pages: 1967 - 1973
Mechanical material characterization of photosensitive polymers
J. Vogel
H.-J. Feige
J. Grimm
Technical Paper 15 December 2013 Pages: 1975 - 1979
Simulation and fabrication of a branch-channel rhombic micromixer for low pressure drop and short mixing length
C. K. Chung
C. K. Chang
C. C. Lai
Technical Paper 18 December 2013 Pages: 1981 - 1986
Application of metal film protection to microfluidic chip fabrication using CO₂ laser ablation
C. K. Chung
K. Z. Tu
Technical Paper 24 December 2013 Pages: 1987 - 1992
Fabrication of gold nanoparticle pattern using imprinted hydrogen silsesquioxane pattern for surface-enhanced Raman scattering
Yuji Kang
Takao Fukuoka
Shinji Matsui
Technical Paper 22 December 2013 Pages: 1993 - 2000
Replication of sub-100 nm structures using h- and s-PDMS composite stamps
Christoph Huelsen
Juergen Probst
Bernd Loechel
Technical Paper 22 December 2013 Pages: 2001 - 2004
Fabrication of micro pore optics with smooth sidewall using X-ray lithography
Tianchong Zhang
Futing Yi
Xinshuai Zhang
Technical Paper 20 December 2013 Pages: 2005 - 2010
Replication processes for metal and ceramic micro parts
Volker Piotter
E. Honza
J. Prokop
Technical Paper 24 December 2013 Pages: 2011 - 2016
Infrared heated μ-blistering, a new fabrication technology for HARMST
Thomas Schmidt
Claas Mueller
Holger Reinecke
Technical Paper 09 January 2014 Pages: 2017 - 2022
Characterization method for new resist formulations for HAR patterns made by X-ray lithography
Danays Kunka
Jürgen Mohr
Gabi Grützner
Technical Paper 31 December 2013 Pages: 2023 - 2029
LIGA micro-openings for coherence characterization of X-rays
V. Nazmov
M. Kluge
R. Simon
Technical Paper 09 January 2014 Pages: 2031 - 2036
Photo-lithographic patterning of biomimetic molecularly imprinted polymer thin films onto silicon wafers
Reinhard I. Boysen
Lachlan J. Schwarz
Milton T. W. Hearn
Technical Paper 04 January 2014 Pages: 2037 - 2043
X-ray zone plates with 25 aspect ratio using a 2-μm-thick ultrananocrystalline diamond mold
Michael J. Wojcik
Derrick C. Mancini
Leonidas E. Ocola
Technical Paper 25 January 2014 Pages: 2045 - 2050
3D nanometer features by ultra precision machining
Kurt Haskic
Stefan Kühne
Martin Schmidt
Technical Paper 04 January 2014 Pages: 2051 - 2053
Development of high aspect ratio X-ray parabolic compound refractive lens at Indus-2 using X-ray lithography
V. P. Dhamgaye
M. K. Tiwari
G. S. Lodha
Technical Paper 17 January 2014 Pages: 2055 - 2060
Status of laminar grating manufacturing via lithography at HZB
S. Lemke
T. Seliger
B. Loechel
Technical Paper 17 January 2014 Pages: 2061 - 2064
Orthogonal and fine lithographic structures attained from the next generation proton beam writing facility
Y. Yao
P. Santhana Raman
J. A. van Kan
Technical Paper 14 January 2014 Pages: 2065 - 2069
Fabrication and characterization of polymer microprisms
William Brian Derek Forfang
Timothy Glenn Conner
In-Hyouk Song
Technical Paper 10 January 2014 Pages: 2071 - 2077
Resist evaluation for proton beam writing, Ni mold fabrication and nano-replication
Y. H. Wang
P. Malar
J. A. van Kan
Technical Paper 22 January 2014 Pages: 2079 - 2088
Potential of BPN as a new negative photoresist for a very thick layer with high aspect ratio
David Bourrier
A. Ghannam
H. Granier
Technical Paper 18 January 2014 Pages: 2089 - 2096
High aspect ratio submicrometer two-dimensional structures fabricated by one-photon absorption direct laser writing
Mai Trang Do
Qinggele Li
Ngoc Diep Lai
Technical Paper 06 February 2014 Pages: 2097 - 2102
Fabrication and characterization of machined 3D diffractive optical elements
Stefan Kühne
Kurt Haskic
Martin Schmidt
Technical Paper 26 March 2014 Pages: 2103 - 2107

Volume 20, Issue 10-11

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