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3D nanometer features by ultra precision machining

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Abstract

Until now grating machines were mainly used to produce high-resolution mechanically divided gratings by scratching the structures in thin metal layers. Hereinafter, a new method is presented to produce echelette as well as echelle gratings on curved substrate surfaces. This is achieved with a modified planing procedure whereupon there are no limits to the maximum structure height.

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References

  • Balzer A, Bischoff P, Follath R, Herrdendörfer D, Reichardt G, Stange P (2005) ICALEPCS, Geneva, MO4B.2-2O

  • Gale HG (1937) Astrophys J 85(2):49–61

    Article  Google Scholar 

  • Heydeman PLM (1981) Appl Opt 20(19):3382–3384

    Article  Google Scholar 

  • Hynd JW, Hollinger AG, Rank DH, Wiggins TA (1969) Appl Opt 8(11):2342–2344

    Article  Google Scholar 

  • Kühne S, Haskic K, Lemke S, Schmidt M (2013) HARMNST, Berlin

  • Loewen EG (1976) Opt Eng 15(5):446–450

    Article  Google Scholar 

  • Palmer C (2005) Diffraction grating handbook; sixth edition. Newport Corporation, New York

    Google Scholar 

  • Strong J (1951) J Optical Soc Am 41(1):3–15

    Article  Google Scholar 

  • Verrill JF (1970) Opt Acta: Int J Opt 17(10):747–759

    Article  Google Scholar 

Download references

Acknowledgments

We would like to thank Prof. Dr. Alexei Erko, head of the institute Nanometeroptik und Technologie (HZB) for cooperation. In Addition we want to remember Prof. Dr. Martin Schmidt, head of the department MFG who unfortunately died this year.

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Authors and Affiliations

  1. Fachgebiet Mikro- und Feingeräte (MFG), Institut für Werkzeugmaschinen und Fabrikbetrieb (IWF), Technische Universität Berlin, Pascalstraße 8-9, Sek. PTZ 1, 10587, Berlin, Germany

    Kurt Haskic, Stefan Kühne & Martin Schmidt

  2. Institut Nanometeroptik und Technologie, Helmholtz-Zentrum Berlin für Materialien und Energie, Albert-Einstein-Straße 15, 12489, Berlin, Germany

    Bernd Löchel

Authors
  1. Kurt Haskic
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  2. Stefan Kühne
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  3. Bernd Löchel
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  4. Martin Schmidt
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Corresponding author

Correspondence to Kurt Haskic.

Additional information

K. Haskic and S. Kühne equally contributing.

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Haskic, K., Kühne, S., Löchel, B. et al. 3D nanometer features by ultra precision machining. Microsyst Technol 20, 2051–2053 (2014). https://doi.org/10.1007/s00542-013-2059-6

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  • DOI: https://doi.org/10.1007/s00542-013-2059-6

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